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Origins of interlayer formation and misfit dislocation displacement in the vicinity of InAs/GaAs quantum dots

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.4891330· OSTI ID:22311143
; ;  [1]
  1. Department of Materials Science and Engineering, University of Michigan, Ann Arbor, Michigan 48109 (United States)

We have examined the origins of interlayer formation and misfit dislocation (MD) displacement in the vicinity of InAs/GaAs quantum dots (QDs). For QDs formed by the Stranski-Krastanov mode, regularly spaced MDs nucleate at the interface between the QD and the GaAs buffer layer. In the droplet epitaxy case, both In island formation and In-induced “nano-drilling” of the GaAs buffer layer are observed during In deposition. Upon annealing under As flux, the In islands are converted to InAs QDs, with an InGaAs interlayer at the QD/buffer interface. Meanwhile, MDs nucleate at the QD/interlayer interface.

OSTI ID:
22311143
Journal Information:
Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 3 Vol. 105; ISSN APPLAB; ISSN 0003-6951
Country of Publication:
United States
Language:
English