Defect study in molecular beam epitaxy-grown HgCdTe films with activated and unactivated arsenic
Journal Article
·
· Journal of Applied Physics
- A.V. Rzhanov Institute of Semiconductor Physics, Siberian Branch of the Russian Academy of Sciences, Novosibirsk 630090 (Russian Federation)
- Ioffe Physical-Technical Institute of the Russian Academy of Sciences, St. Petersburg 194021 (Russian Federation)
- P. Sahaydachnyi Army Academy, Lviv 79012 (Ukraine)
- Center of Microelectronics and Nanotechnology, Rzeszów University, Rzeszów 35-310 (Poland)
- National Research Tomsk State University, Tomsk 634050 (Russian Federation)
A defect study was performed on molecular beam epitaxy-grown HgCdTe films in situ doped with arsenic. Doping was performed from either effusion cell or cracker cell, and studied were both as-grown samples and samples subjected to arsenic activation annealing. Electrical properties of the films were investigated with the use of ion milling as a means of “stirring” defects in the material. As a result of the study, it was confirmed that the most efficient incorporation of electrically active arsenic occurs at the cracking zone temperature of 700 °C. Interaction between arsenic and tellurium during the growth was observed and is discussed in the paper.
- OSTI ID:
- 22273533
- Journal Information:
- Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 16 Vol. 115; ISSN JAPIAU; ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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