Cosputtered composition-spread reproducibility established by high-throughput x-ray fluorescence

Journal Article · Wed Sep 15 04:00:00 EDT 2010 · Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films

DOI:https://doi.org/10.1116/1.3478668· OSTI ID:22054000

Gregoire, John M; Dale, Darren; Kazimirov, Alexander; DiSalvo, Francis J; Dover, R Bruce van ^[1]

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1. Department of Materials Science and Engineering, Cornell University, Ithaca, New York 14853 (United States)

We describe the characterization of sputtered yttria-zirconia composition spread thin films by x-ray fluorescence (XRF). We also discuss our automated analysis of the XRF data, which was collected in a high throughput experiment at the Cornell High Energy Synchrotron Source. The results indicate that both the composition reproducibility of the library deposition and the composition measurements have a precision of better than 1 atomic percent.

• OSTI ID: 22054000
• Journal Information: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films, Journal Name: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films Journal Issue: 5 Vol. 28; ISSN 1553-1813
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ACCURACY
CORNELL 10-GEV SYNCHROTRON
DEPOSITION
SPUTTERING
THIN FILMS
X-RAY FLUORESCENCE ANALYSIS
YTTRIUM OXIDES
ZIRCONIUM OXIDES