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X-Ray fluorescence as an in-situ composition monitor during CuIn{sub x}Ga{sub 1-x}Se{sub 2} deposition

Journal Article · · AIP Conference Proceedings
DOI:https://doi.org/10.1063/1.57961· OSTI ID:21205261
; ; ;  [1]
  1. Materials Research Group, Inc., 12441 W. 49th Ave., Suite 2, Wheat Ridge, Colorado 80033-1927 (United States)
The principles of x-ray fluorescence (XRF), and differences between the use of XRF as an in-situ composition sensor in CIGS module fabrication and the use of XRF in typical applications, are described. It is demonstrated for measurements on CIGS samples how a number of conditions, including interelement effects and composition gradients, may complicate conversion of XRF signals to composition. Factors controlling the precision of the measurement are enumerated.
OSTI ID:
21205261
Journal Information:
AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 462; ISSN APCPCS; ISSN 0094-243X
Country of Publication:
United States
Language:
English