Cosputtered composition-spread reproducibility established by high-throughput x-ray fluorescence

Journal Article · Wed Sep 01 04:00:00 EDT 2010 · Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films

DOI:https://doi.org/10.1116/1.3478668· OSTI ID:1380885

Gregoire, John M.; Dale, Darren; Kazimirov, Alexander; DiSalvo, Francis J.; Bruce van Dover, R.

• Research Organization: Energy Frontier Research Centers (EFRC) (United States). Energy Materials Center at Cornell (EMC2)
• Sponsoring Organization: USDOE SC Office of Basic Energy Sciences (SC-22)
• DOE Contract Number: SC0001086
• OSTI ID: 1380885
• Journal Information: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films, Journal Name: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films Journal Issue: 5 Vol. 28; ISSN 0734-2101
• Publisher: American Vacuum Society
• Country of Publication: United States
• Language: English

Related Subjects

catalysis (heterogeneous)
catalysis (homogeneous)
charge transport
defects
energy storage (including batteries and capacitors)
hydrogen and fuel cells
materials and chemistry by design
membrane
synthesis (novel materials)
synthesis (scalable processing)
synthesis (self-assembly)