Annealing-induced evolution of optical properties of the multilayered nanoperiodic SiO{sub x}/ZrO{sub 2} system containing Si nanoclusters

Journal Article · Wed Jun 15 00:00:00 EDT 2011 · Semiconductors

DOI:https://doi.org/10.1134/S1063782611060108· OSTI ID:22004799

Tetelbaum, D I; Chugrov, I A; Mashin, A I; Mikhaylov, A N; Nezhdanov, A V; Ershov, A A; Karabanova, I A ^[1]

---

1. Lobachevsky Nizhni Novgorod State University (Russian Federation)

The photoluminescence, infrared absorption, and Raman spectra of amorphous multilayered nanoperiodic a-SiO{sub x}/ZrO{sub 2} structures produced by vacuum evaporation and then annealed at different temperatures (500-1100 Degree-Sign C) are studied. It is established that the evolution of the optical properties with increasing annealing temperature is controlled by sequential transformation of Si clusters formed in the SiO{sub x} layers from nonphase inclusions to amorphous clusters and then to nanocrystals. The finally formed nanocrystals are limited in sizes by the thickness of the initial SiO{sub x} layers and by chemical reactions with ZrO{sub 2}.

• OSTI ID: 22004799
• Journal Information: Semiconductors, Vol. 45, Issue 6; Other Information: Copyright (c) 2011 Pleiades Publishing, Ltd.; Country of input: International Atomic Energy Agency (IAEA); ISSN 1063-7826
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ABSORPTION
ANNEALING
CHEMICAL REACTIONS
INCLUSIONS
LAYERS
NANOSTRUCTURES
OPTICAL PROPERTIES
PHOTOLUMINESCENCE
RAMAN SPECTRA
SILICON OXIDES
THICKNESS
VACUUM EVAPORATION
ZIRCONIUM OXIDES