Structural and spectral features of MOCVD Al{sub x}Ga{sub y}In{sub 1-x-y}As{sub z}P{sub 1-z}/GaAs (100) alloys
- Voronezh State University (Russian Federation)
- Russian Academy of Sciences, Ioffe Physical-Technical Institute (Russian Federation)
The study is concerned with MOCVD epitaxial heterostructures grown on the basis of Al{sub x}Ga{sub y}In{sub 1-x-y}As{sub z}P{sub 1-z} quinary alloys in the region of alloy compositions isoperiodic to GaAs. By the X-ray diffraction technique and atomic force microscopy, it is shown that, on the surface of the heterostructures, there are nanometric objects capable of lining up along a certain direction. From calculations of the crystal lattice parameters with consideration for internal strains, it can be inferred that the new compound is a phase based on the Al{sub x}Ga{sub y}In{sub 1-x-y}As{sub z}P{sub 1-z} alloy.
- OSTI ID:
- 22004667
- Journal Information:
- Semiconductors, Journal Name: Semiconductors Journal Issue: 6 Vol. 46; ISSN SMICES; ISSN 1063-7826
- Country of Publication:
- United States
- Language:
- English
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