Microstructural and dielectric properties of Ba{sub 0.6}Sr{sub 0.4}Ti{sub 1-x}Zr{sub x}O{sub 3} based combinatorial thin film capacitors library
- Laboratoire d'Electrodynamique des Materiaux Avances (LEMA), UMR 6157 CNRS/CEA, Universite Francois Rabelais, Parc de Grandmont, 37200 Tours (France)
Epitaxial growth of Ba{sub 0.6}Sr{sub 0.4}Ti{sub 1-x}Zr{sub x}O{sub 3} (0{<=}x{<=}0.3) composition spread thin film library on SrRuO{sub 3}/SrTiO{sub 3} layer by combinatorial pulsed laser deposition (PLD) is reported. X-ray diffraction and energy dispersive x-ray spectroscopy studies showed an accurate control of the film phase and composition by combinatorial PLD. A complex evolution of the microstructure and morphology with composition of the library is described, resulting from the interplay between epitaxial stress, increased chemical pressure, and reduced elastic energy upon Zr doping. Statistical and temperature-related capacitive measurements across the library showed unexpected variations in the dielectric properties. Doping windows with enhanced permittivity and tunability are identified, and correlated to microstructural properties.
- OSTI ID:
- 21537967
- Journal Information:
- Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 11 Vol. 108; ISSN JAPIAU; ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
CAPACITORS
COHERENT SCATTERING
CRYSTAL GROWTH METHODS
CRYSTAL STRUCTURE
DEPOSITION
DIELECTRIC PROPERTIES
DIFFRACTION
ELECTRICAL EQUIPMENT
ELECTRICAL PROPERTIES
ELECTROMAGNETIC RADIATION
ENERGY BEAM DEPOSITION
EPITAXY
EQUIPMENT
FILMS
INDUSTRY
IONIZING RADIATIONS
IRRADIATION
LASER RADIATION
LAYERS
MICROSTRUCTURE
MINERAL INDUSTRY
OXYGEN COMPOUNDS
PERMITTIVITY
PHYSICAL PROPERTIES
PULSED IRRADIATION
RADIATIONS
REFRACTORY METAL COMPOUNDS
RUTHENIUM COMPOUNDS
SCATTERING
SPECTROSCOPY
STRESSES
STRONTIUM COMPOUNDS
STRONTIUM TITANATES
SURFACE COATING
THIN FILMS
TITANATES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
X RADIATION
X-RAY DIFFRACTION
X-RAY SPECTROSCOPY
ZIRCONIUM COMPOUNDS