Measurement of plasma-surface energy fluxes in an argon rf-discharge by means of calorimetric probes and fluorescent microparticles

Journal Article · Mon Nov 15 04:00:00 EST 2010 · Physics of Plasmas

DOI:https://doi.org/10.1063/1.3484876· OSTI ID:21532043

Maurer, H R; Kersten, H ^[1]; Hannemann, M; Basner, R ^[2]

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1. Institute for Experimental and Applied Physics, Christian-Albrechts-University, 24098 Kiel (Germany)
2. INP Greifswald e.V., Felix-Hausdorff-Strasse 2, 17489 Greifswald (Germany)

Measured energy influx densities toward a tungsten dummy substrate in an argon rf-plasma are presented and a model for the description of the energy influx density based on plasma parameters, which have been obtained by Langmuir probe measurements, is applied. Furthermore, temperature measurements of microparticles are presented, which are confined in the plasma sheath. An extension of the model is developed for the description of the energy influx density to the particles. The comparison of model and experimental results offer the possibility to obtain an improved understanding of plasma-surface interactions.

• OSTI ID: 21532043
• Journal Information: Physics of Plasmas, Journal Name: Physics of Plasmas Journal Issue: 11 Vol. 17; ISSN PHPAEN; ISSN 1070-664X
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ARGON
CALORIMETRY
ELECTRIC DISCHARGES
ELECTRIC PROBES
ELEMENTS
ENERGY
FLUIDS
FREE ENERGY
GASES
HIGH-FREQUENCY DISCHARGES
LANGMUIR PROBE
NONMETALS
PHYSICAL PROPERTIES
PLASMA
PLASMA DENSITY
PLASMA SHEATH
PROBES
RARE GASES
SURFACE ENERGY
SURFACE PROPERTIES
TEMPERATURE MEASUREMENT
THERMODYNAMIC PROPERTIES