The charging of microparticles in electrode sheath of rf discharge
- Inst. of Theoretical and Applied Mechanics, Novosibirsk (Russian Federation)
Recent experiments draw attention to problem concerning the charging of {open_quote}dust{close_quote} particles in rf discharge plasma. To study this problem of charging in sheath we have to define the electron flux onto the particle is related to prescription of the shape of the distribution function of electrons. Instead of kinetic description we use combined approach. Initially we solve the equations for one-dimensional rf-discharge equations in the hydrodynamics approach, including ion inertia and gas heating. Thus we obtain the averaged over period profile of the ion distribution function. More detail description of this algorithm of calculation of rf-discharge can be found in further self-consistently we solve the kinetic equation for the electron distribution function by the Monte-Carlo method and Poisson equation with given ion density. Calculation were carried out for the conditions of experiment where the gas pressure is 75 Pa, the frequency is 13.56 MHz, interelectrode distance 6 cm and for two values W = 0.01, W = 0.02 W/cm{sup 2}. Since the gas pressure is large the collision heating of electrons becomes general. The mean potential of plasma relatively electrode is small 40 {divided_by} 50 V and discharge operates in a regime. Electron distribution function in electrode sheath which concludes in increase of part of high energy electrons that lead to appearance of the well known maximum of the gas ionization rate within sheath.
- OSTI ID:
- 212960
- Report Number(s):
- CONF-950749--
- Country of Publication:
- United States
- Language:
- English
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