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The interaction potential of microparticles in electrode sheath of rf discharge

Conference ·
OSTI ID:212962
 [1]
  1. Inst. of Theoretical and Applied Mechanics, Novosibirsk (Russian Federation)

It is known from experiments that charged {open_quote}dust{close_quote} particles in rf discharge form the ordered structure. This work is devoted to definition of the potential of interaction between particles in an strong electrical field of electrode sheath. For study the potential of the particle we use standard approximations of theory of electrode sheath of rf discharge with frequency exceeding the plasma frequency and being less than the electron plasma one. Electrons distribution is assumed to be the Bolzmann one with some temperature T{sub e}, and ions move within the averaged over period potential {phi}{sub a}, where q{sub i} is the rate of ionization being constant within sheath.

OSTI ID:
212962
Report Number(s):
CONF-950749--
Country of Publication:
United States
Language:
English