Expansion mechanism of the electrode sheath in RF glow discharge plasma
Conference
·
OSTI ID:212980
When RF voltage is applied between parallel-plate electrodes, sheaths are found in front of each electrodes and a plasma connects these sheaths. It is expected that the sheaths will expand and contract on each electrodes successively in conjunction with RF voltage, The purpose of this research is to analyze the expansion velocity of the electrode sheaths. Since the negative glow is considered as the boundary between sheath and the plasma, we measure the movement of negative glow at the discharges of 13.56 MHz by optical emission spectroscopy.
- OSTI ID:
- 212980
- Report Number(s):
- CONF-950749--
- Country of Publication:
- United States
- Language:
- English
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