Electrode surface rf harmonics generated by the nonlinear sheath in a coaxial capacitive rf discharge

Conference · Sat Jul 01 00:00:00 EDT 1989 · AIP Conference Proceedings (American Institute of Physics); (USA)

OSTI ID:6476071

Savas, S E ^[1]

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1. Applied Materials, Santa Clara, CA (USA)

rf harmonics of the 13.56 MHz excitation signal have been measured on the electrode surface in a large coaxial capacitive discharge. These are seen to have from 10% of the fundamental amplitude for the second harmonic to between 1% and 4% for the third and fourth harmonics. There is evidence that these modes propragate as TEM surface waves (Gould-Trivelpiece modes) along the length of the electrode. The Telegrapher's equations can be written for the system with non-constant shunt capacitance and admittance. The resulting nonlinear equation for the sheath voltage is solved for the harmonics to yield approximate agreement with their observed magnitudes.

• OSTI ID: 6476071
• Report Number(s): CONF-8905120--
• Journal Information: AIP Conference Proceedings (American Institute of Physics); (USA), Journal Name: AIP Conference Proceedings (American Institute of Physics); (USA) Vol. 190:1; ISSN 0094-243X; ISSN APCPC
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
700102* -- Fusion Energy-- Plasma Research-- Diagnostics
CAPACITANCE
ELECTRIC DISCHARGES
ELECTRICAL PROPERTIES
ELECTRODES
HARMONICS
HIGH-FREQUENCY DISCHARGES
OSCILLATIONS
PHYSICAL PROPERTIES
PLASMA DIAGNOSTICS
VOLTAGE DROP
WAVE PROPAGATION