Modes and the alpha-gamma transition in rf capacitive discharges in N{sub 2}O at different rf frequencies
- Laboratoire de Physique et Technologie des Plasmas, Ecole Polytechnique, Palaiseau 91128, France and Kharkov National University, Kharkov 61077 (Ukraine)
This paper reports current-voltage characteristics and pressure-voltage transition curves from the weak-current {alpha}-mode to the strong-current {gamma}-mode for rf capacitive discharges in N{sub 2}O at frequencies of 2 MHz, 13.56 MHz, and 27.12 MHz. At 2 MHz the rf discharge is mostly resistive whereas at 13.56 MHz and 27.12 MHz it is mostly capacitive. The weak-current {alpha}-mode was found to exist only above a certain minimum gas pressure for all frequencies studied. N. Yatsenko [Sov. Phys. Tech. Phys. 26, 678 (1981)] previously proposed that the {alpha}-{gamma} transition corresponds to breakdown of the sheaths. However, we show that this is the case only for sufficiently high gas pressures. At lower pressure there is a smooth transition from the weak-current {alpha}-mode to a strong-current {gamma}-mode, in which the sheaths produce fast electrons but the sheath has not undergone breakdown.
- OSTI ID:
- 20860331
- Journal Information:
- Physics of Plasmas, Journal Name: Physics of Plasmas Journal Issue: 10 Vol. 13; ISSN PHPAEN; ISSN 1070-664X
- Country of Publication:
- United States
- Language:
- English
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