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Measuring the temperature of microparticles in plasmas

Journal Article · · Review of Scientific Instruments
DOI:https://doi.org/10.1063/1.2987688· OSTI ID:21266427
;  [1];  [2]
  1. INP Greifswald, Felix-Hausdorff-Str. 2, D-17489 Greifswald (Germany)
  2. IEAP Kiel, Leibnizstr. 19, D-24098 Kiel (Germany)
Temperature sensitive features of particular phosphors were utilized for measuring the temperature T{sub p} of microparticles, confined in the sheath of a rf plasma. The experiments were performed under variation of argon pressure and rf power of the process plasma. T{sub p} has been determined by evaluation of characteristic fluorescent lines. The results for T{sub p} measurements are strongly dependent on rf power and gas pressure.
OSTI ID:
21266427
Journal Information:
Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 9 Vol. 79; ISSN 0034-6748; ISSN RSINAK
Country of Publication:
United States
Language:
English