Measuring the temperature of microparticles in plasmas
Journal Article
·
· Review of Scientific Instruments
- INP Greifswald, Felix-Hausdorff-Str. 2, D-17489 Greifswald (Germany)
- IEAP Kiel, Leibnizstr. 19, D-24098 Kiel (Germany)
Temperature sensitive features of particular phosphors were utilized for measuring the temperature T{sub p} of microparticles, confined in the sheath of a rf plasma. The experiments were performed under variation of argon pressure and rf power of the process plasma. T{sub p} has been determined by evaluation of characteristic fluorescent lines. The results for T{sub p} measurements are strongly dependent on rf power and gas pressure.
- OSTI ID:
- 21266427
- Journal Information:
- Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 9 Vol. 79; ISSN 0034-6748; ISSN RSINAK
- Country of Publication:
- United States
- Language:
- English
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