Effect of the levitating microparticle cloud on radiofrequency argon plasma

Journal Article · Wed Jun 16 04:00:00 EDT 2010 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.3460112· OSTI ID:21366932

Mitic, S; Pustylnik, M Y; Klumov, B A; Morfill, G E ^[1]

---

1. Max-Planck-Institut fuer Extraterrestrische Physik, Giessenbachstrasse 1, 85741, Garching (Germany)

The effect of a levitating cloud of microparticles on the parameters of a radiofrequency (RF) plasma has been studied by means of two experimental techniques. Axial distributions of 1s excited states of argon were measured by a self-absorption method. A correction of a standard self-absorption method for the extinction of the light by the levitating microparticles is proposed. In addition the electron temperature was estimated using the optical emission spectroscopy. Measurements at the same discharge conditions in a microparticle-free discharge and discharge, containing a cloud of levitating microparticles, revealed the non-local influence of the microparticle cloud on the discharge plasma. The most probable cause of this influence is the disturbance of the ionization balance by the levitating microparticles.

• OSTI ID: 21366932
• Journal Information: AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 1242; ISSN APCPCS; ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
74 ATOMIC AND MOLECULAR PHYSICS
ABSORPTION
ARGON
ELECTROMAGNETIC RADIATION
ELECTRON TEMPERATURE
ELEMENTS
EMISSION
EMISSION SPECTROSCOPY
ENERGY LEVELS
EXCITED STATES
FLUIDS
GASES
IONIZATION
LUMINESCENCE
NONMETALS
PARTICLES
PHOTON EMISSION
PLASMA
RADIATIONS
RADIOWAVE RADIATION
RARE GASES
SELF-ABSORPTION
SORPTION
SPECTROSCOPY