Influence of annular magnet on discharge characteristics in enhanced glow discharge plasma immersion ion implantation

Journal Article · Mon Jan 10 04:00:00 EST 2011 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.3537962· OSTI ID:21518241

Liuhe, Li; Zhuo, Wang ^[1]; Qiuyuan, Lu; Fu, Ricky K. Y.; Chu, Paul K ^[1]; Enjing, Pang; Dandan, Dun; Fushun, He; Fen, Li ^[2]

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1. Department of Physics and Materials Science, City University of Hong Kong, Tat Chee Avenue, Kowloon (Hong Kong)
2. Department 702, School of Mechanical and Automation Engineering, Beijing University of Aeronautics and Astronautics, Beijing (China)

A permanent annular magnet positioned at the grounded anode alters the discharge characteristics in enhanced glow discharge plasma immersion ion implantation (EGD-PIII). The nonuniform magnetic field increases the electron path length and confines electron motion due to the magnetic mirror effect and electron-neutral collisions thus occur more frequently. The plasma potential and ion density measured by a Langmuir probe corroborate that ionization is improved near the grounded anode. This hybrid magnetic field EGD-PIII method is suitable for implantation of gases with low ionization rates.

• OSTI ID: 21518241
• Journal Information: Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 2 Vol. 98; ISSN APPLAB; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ANODES
ELECTRIC DISCHARGES
ELECTRIC POTENTIAL
ELECTRIC PROBES
ELECTRODES
ELECTRONS
ELEMENTARY PARTICLES
EQUIPMENT
FERMIONS
FLUID MECHANICS
GLOW DISCHARGES
HYDRODYNAMICS
ION DENSITY
ION IMPLANTATION
IONIZATION
LANGMUIR PROBE
LEPTONS
MAGNETIC FIELDS
MAGNETIC MIRRORS
MAGNETOHYDRODYNAMICS
MAGNETS
MECHANICS
OPEN PLASMA DEVICES
PERMANENT MAGNETS
PLASMA
PLASMA POTENTIAL
PROBES
THERMONUCLEAR DEVICES