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Laser spectroscopy of the products of photoevaporation with a short-wavelength ({lambda} = 193 nm) excimer laser

Journal Article · · Quantum Electronics (Woodbury, N.Y.)
; ;  [1];  [2];  [3]
  1. A.M. Prokhorov General Physics Institute, Russian Academy of Sciences, Moscow (Russian Federation)
  2. Institute of Organic Chemistry, Tartu State University, Tartu (Estonia)
  3. Natural Science Center, A.M. Prokhorov General Physics Institute, Russian Academy of Sciences, Moscow (Russian Federation)
An excimer laser spectrometer was designed and constructed. It consists of a high-vacuum interaction chamber, a short-wavelength ({lambda} = 193 nm) excimer ArF laser used for evaporation, a probe dye laser pumped by an XeCl excimer laser, and a system for recording a laser-induced fluorescence signal. This spectrometer was used to investigate nonthermal mechanisms of photoevaporation of a number of wide-gap dielectrics. (laser applications and other topics in quantum electronics)
OSTI ID:
21442598
Journal Information:
Quantum Electronics (Woodbury, N.Y.), Journal Name: Quantum Electronics (Woodbury, N.Y.) Journal Issue: 2 Vol. 29; ISSN 1063-7818
Country of Publication:
United States
Language:
English