Laser spectroscopy of the products of photoevaporation with a short-wavelength ({lambda} = 193 nm) excimer laser
Journal Article
·
· Quantum Electronics (Woodbury, N.Y.)
- A.M. Prokhorov General Physics Institute, Russian Academy of Sciences, Moscow (Russian Federation)
- Institute of Organic Chemistry, Tartu State University, Tartu (Estonia)
- Natural Science Center, A.M. Prokhorov General Physics Institute, Russian Academy of Sciences, Moscow (Russian Federation)
An excimer laser spectrometer was designed and constructed. It consists of a high-vacuum interaction chamber, a short-wavelength ({lambda} = 193 nm) excimer ArF laser used for evaporation, a probe dye laser pumped by an XeCl excimer laser, and a system for recording a laser-induced fluorescence signal. This spectrometer was used to investigate nonthermal mechanisms of photoevaporation of a number of wide-gap dielectrics. (laser applications and other topics in quantum electronics)
- OSTI ID:
- 21442598
- Journal Information:
- Quantum Electronics (Woodbury, N.Y.), Journal Name: Quantum Electronics (Woodbury, N.Y.) Journal Issue: 2 Vol. 29; ISSN 1063-7818
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
ARGON COMPOUNDS
ARGON FLUORIDES
DIELECTRIC MATERIALS
DYE LASERS
EMISSION
EVAPORATION
EXCIMER LASERS
FLUORESCENCE
FLUORIDES
FLUORINE COMPOUNDS
GAS LASERS
HALIDES
HALOGEN COMPOUNDS
LASER SPECTROSCOPY
LASERS
LIQUID LASERS
LUMINESCENCE
MATERIALS
MEASURING INSTRUMENTS
PHASE TRANSFORMATIONS
PHOTON EMISSION
PROBES
RARE GAS COMPOUNDS
SIGNALS
SPECTROMETERS
SPECTROSCOPY
WAVELENGTHS
ARGON COMPOUNDS
ARGON FLUORIDES
DIELECTRIC MATERIALS
DYE LASERS
EMISSION
EVAPORATION
EXCIMER LASERS
FLUORESCENCE
FLUORIDES
FLUORINE COMPOUNDS
GAS LASERS
HALIDES
HALOGEN COMPOUNDS
LASER SPECTROSCOPY
LASERS
LIQUID LASERS
LUMINESCENCE
MATERIALS
MEASURING INSTRUMENTS
PHASE TRANSFORMATIONS
PHOTON EMISSION
PROBES
RARE GAS COMPOUNDS
SIGNALS
SPECTROMETERS
SPECTROSCOPY
WAVELENGTHS