Quasi-cw excimer laser. Final report, 1 Aug 88-31 Dec 90
A Phase II SBIR investigation of small high-repetition-rate waveguide excimers lasers is described. Techniques for fabrication of halogen-compatible discharge structures were investigated, and a KrF laser based on electrodeless microwave discharge technology was constructed. A solid-state magnetron driver for waveguide excimer lasers was developed, and studies of KrF laser gas consumption rates were conducted. A preliminary investigation of ArF laser operation was carried out and operation of a XeCl laser at pulse repetition rates as high as 13 kHz was demonstrated. In addition, waveguide XeCl laser pumping of a jet-stream dye laser and high prf photoablation by KrF and XeCl lasers was investigated.
- Research Organization:
- Potomac Photonics, Inc., Lanham, MD (United States)
- OSTI ID:
- 5337708
- Report Number(s):
- AD-A-234771/4/XAB; CNN: F49620-88-C-0092
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
426002* -- Engineering-- Lasers & Masers-- (1990-)
CHLORIDES
CHLORINE COMPOUNDS
DESIGN
ELECTRIC DISCHARGES
ELECTRODES
ELECTROMAGNETIC RADIATION
ELECTRON TUBES
ELECTRONIC EQUIPMENT
EQUIPMENT
EXCIMER LASERS
FABRICATION
FLUIDS
GAS LASERS
GASES
HALIDES
HALOGEN COMPOUNDS
KINETICS
KRYPTON FLUORIDE LASERS
LASERS
MAGNETRONS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
OPERATION
RADIATIONS
RARE GAS COMPOUNDS
REACTION KINETICS
RESEARCH PROGRAMS
ULTRAVIOLET RADIATION
WAVEGUIDES
XENON CHLORIDES
XENON COMPOUNDS