Micromachined Fabry-Perot interferometric pressure sensor for automotive combustion engine

Technical Report · Thu Sep 01 00:00:00 EDT 1994

DOI:https://doi.org/10.2172/212541· OSTI ID:212541

Lee, S B; Yu, C M; Ciarlo, D R; Sheem, S K

In this paper, the authors report a dynamic cylinder pressure sensor for automotive combustion engine. The pressure is sensed by measuring the pressure-induced deflection of a membrane via a Fabry-Perot optical interferometric effect. The sensor is micromachined on a silicon wafer to minimize the cost and the size and to enhance the device quality in high-volume production mode. As a preliminary test, they measured the pressure of an air compressor using the micromachined miniature sensor.

• Research Organization: Lawrence Livermore National Lab., CA (United States)
• Sponsoring Organization: USDOE, Washington, DC (United States)
• DOE Contract Number: W-7405-ENG-48
• OSTI ID: 212541
• Report Number(s): UCRL-JC--118376; CONF-9409202--4; ON: DE96008712
• Country of Publication: United States
• Language: English

Related Subjects

33 ADVANCED PROPULSION SYSTEMS
44 INSTRUMENTATION
INCLUDING NUCLEAR AND PARTICLE DETECTORS
AUTOMOBILES
DESIGN
EXPERIMENTAL DATA
FABRY-PEROT INTERFEROMETER
INTERNAL COMBUSTION ENGINES
MINIATURIZATION
PERFORMANCE
PRESSURE GAGES
PRESSURE MEASUREMENT