Micromachined Fabry-Perot interferometric pressure sensor for automotive combustion engine

Technical Report · Thu Sep 01 00:00:00 EDT 1994

DOI:https://doi.org/10.2172/212541· OSTI ID:212541

Lee, S B; Yu, C M; Ciarlo, D R; Sheem, S K

In this paper, the authors report a dynamic cylinder pressure sensor for automotive combustion engine. The pressure is sensed by measuring the pressure-induced deflection of a membrane via a Fabry-Perot optical interferometric effect. The sensor is micromachined on a silicon wafer to minimize the cost and the size and to enhance the device quality in high-volume production mode. As a preliminary test, they measured the pressure of an air compressor using the micromachined miniature sensor.

• Research Organization: Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
• Sponsoring Organization: USDOE, Washington, DC (United States)
• DOE Contract Number: W-7405-ENG-48
• OSTI ID: 212541
• Report Number(s): UCRL-JC-118376; CONF-9409202-4; ON: DE96008712; TRN: AHC29608%%86
• Resource Relation: Conference: Sensors Expo 94, Cleveland, OH (United States), 20-22 Sep 1994; Other Information: PBD: Sep 1994
• Country of Publication: United States
• Language: English

Related Subjects

44 INSTRUMENTATION
INCLUDING NUCLEAR AND PARTICLE DETECTORS
33 ADVANCED PROPULSION SYSTEMS
AUTOMOBILES
INTERNAL COMBUSTION ENGINES
PRESSURE MEASUREMENT
PRESSURE GAGES
PERFORMANCE
DESIGN
EXPERIMENTAL DATA
FABRY-PEROT INTERFEROMETER
MINIATURIZATION