Direct coupling of pulsed radio frequency and pulsed high power in novel pulsed power system for plasma immersion ion implantation

Journal Article · Tue Apr 15 04:00:00 EDT 2008 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.2906220· OSTI ID:21123889

Chunzhi, Gong; Xiubo, Tian; Shiqin, Yang ^[1]; Fu, Ricky K. Y.; Chu, Paul K ^[2]

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1. State Key Laboratory of Advanced Welding Production and Technology, School of Materials Science and Engineering, Harbin Institute of Technology, 150001 Harbin (China)
2. Department of Physics and Materials Science, City University of Hong Kong, Tat Chee Avenue, Kowloon (Hong Kong)

A novel power supply system that directly couples pulsed high voltage (HV) pulses and pulsed 13.56 MHz radio frequency (rf) has been developed for plasma processes. In this system, the sample holder is connected to both the rf generator and HV modulator. The coupling circuit in the hybrid system is composed of individual matching units, low pass filters, and voltage clamping units. This ensures the safe operation of the rf system even when the HV is on. The PSPICE software is utilized to optimize the design of circuits. The system can be operated in two modes. The pulsed rf discharge may serve as either the seed plasma source for glow discharge or high-density plasma source for plasma immersion ion implantation (PIII). The pulsed high-voltage glow discharge is induced when a rf pulse with a short duration or a larger time interval between the rf and HV pulses is used. Conventional PIII can also be achieved. Experiments conducted on the new system confirm steady and safe operation.

• OSTI ID: 21123889
• Journal Information: Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 4 Vol. 79; ISSN 0034-6748; ISSN RSINAK
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
AVAILABILITY
COMPUTER CODES
ELECTRIC POTENTIAL
FILTERS
GLOW DISCHARGES
ION IMPLANTATION
MHZ RANGE
OPERATION
PLASMA
PLASMA DENSITY
PLASMA SEEDING
POWER SUPPLIES
POWER SYSTEMS
PULSES
RADIOWAVE RADIATION
RF SYSTEMS
SAMPLE HOLDERS