Rolled-up electromagnetic component for on-chip applications and method of making a rolled-up electromagnetic component

Patent · Tue Jun 08 04:00:00 EDT 2021

OSTI ID:1824060

Li, Xiuling; Huang, Wen; Yang, Zhendong; Kraman, Mark D.; Ni, Jimmy; Ou, Zihao; Chen, Qian; Eden, J. Gary

A rolled-up electromagnetic component for on-chip applications comprises: a multilayer sheet in a rolled configuration comprising at least one turn about a longitudinal axis; a core defined by a first turn of the rolled configuration; and a soft magnetic material disposed within the core, where the multilayer sheet comprises a conductive pattern layer on a strain-relieved layer. A method of making a rolled-up electromagnetic component for on-chip applications includes forming a rolled-up device comprising: a multilayer sheet in a rolled configuration having at least one turn about a longitudinal axis, where the multilayer sheet comprises a conductive pattern layer on a strain-relieved layer; and a core defined by a first turn of the rolled configuration. The method further includes introducing a soft magnetic material into the core.

• Research Organization: Univ. of Illinois, Urbana, IL (United States)
• Sponsoring Organization: USDOE; National Science Foundation (NSF)
• DOE Contract Number: FG02-07ER46471
• Assignee: The Board of Trustees of the University of Illinois (Urbana, IL)
• Patent Number(s): 11,031,456
• Application Number: 16/434,524
• OSTI ID: 1824060
• Country of Publication: United States
• Language: English