Skip to main content
U.S. Department of Energy
Office of Scientific and Technical Information

Rolled-up transformer structure for a radiofrequency integrated circuit (RFIC)

Patent ·
OSTI ID:1250443
A rolled-up transformer structure comprises a multilayer sheet having a rolled configuration comprising multiple turns about a longitudinal axis. The multilayer sheet comprises more than one conductive pattern layer on a strain-relieved layer, including a first conductive film and a second conductive film separated from the first conductive film in a thickness direction. The first conductive film comprises an even number of primary conductive strips, where each primary conductive strip has a length extending in the rolling direction, and the second conductive film comprises an even number of secondary conductive strips, where each secondary conductive strip has a length extending in the rolling direction. In the rolled configuration, turns of the primary conductive strips and turns of the secondary conductive strips wrap around the longitudinal axis. The primary conductive strips serve as a primary winding and the secondary conductive strips serve as a secondary winding of the rolled-up transformer structure.
Research Organization:
The Board of Trustees of the University of Illinois, Urbana, IL (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
FG02-07ER46471
Assignee:
The Board of Trustees of the University of Illinois (Urbana, IL)
Patent Number(s):
9,330,829
Application Number:
14/565,944
OSTI ID:
1250443
Country of Publication:
United States
Language:
English

References (72)

Versatile Approach for Integrative and Functionalized Tubes by Strain Engineering of Nanomembranes on Polymers journal November 2008
Mechanism of SiN[sub x]H[sub y] Deposition from NH[sub 3]-SiH[sub 4] Plasma journal January 1990
Low-dispersion thin-film microstrip lines with cyclotene (benzocyclobutene) as dielectric medium journal April 1997
Directional scrolling of SiGe/Si/Cr nanoribbon on Si(111) surfaces controlled by two-fold rotational symmetry underetching journal January 2013
Modeling of silicon nitride deposition by RF plasma-enhanced chemical vapor deposition journal January 1994
Physical modeling of spiral inductors on silicon journal March 2000
Miniature 3-D inductors in standard CMOS process journal April 2002
Geometry Effect on the Strain-Induced Self-Rolling of Semiconductor Membranes journal October 2010
Controlled Assembly and Dispersion of Strain-Induced InGaAs/GaAs Nanotubes journal July 2008
Coherent emission from ultrathin-walled spiral InGaAs/GaAs quantum dot microtubes journal January 2009
Rolled-up nanotechnology for the fabrication of three-dimensional fishnet-type GaAs-metal metamaterials with negative refractive index at near-infrared frequencies journal April 2012
Membrane folding to achieve three-dimensional nanostructures: Nanopatterned silicon nitride folded with stressed chromium hinges journal January 2006
Morphological Differentiation of Neurons on Microtopographic Substrates Fabricated by Rolled-Up Nanotechnology journal September 2010
A 32nm SoC platform technology with 2nd generation high-k/metal gate transistors optimized for ultra low power, high performance, and high density product applications conference December 2009
Toroidal hollow-core microcavities produced by self-rolling of strained polymer bilayer films journal February 2008
Electroless Silver and Silver with Tungsten Thin Films for Microelectronics and Microelectromechanical System Applications journal January 2000
Generation and registration of disturbances in a gas flow. 1. Formation of arrays of tubular microheaters and microsensors journal March 2009
Stresses and deformation processes in thin films on substrates journal January 1988
Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: I . Orientation Dependence and Behavior of Passivation Layers journal January 1990
Determination of coupling capacitance of underpasses, air bridges and crossings in MICs and MMICs journal January 1987
Transfer of Large-Area Graphene Films for High-Performance Transparent Conductive Electrodes journal December 2009
Fabrication of silicon nitride waveguides for visible-light using PECVD: a study of the effect of plasma frequency on optical properties journal January 2008
Self-Assembled Ultra-Compact Energy Storage Elements Based on Hybrid Nanomembranes journal July 2010
Production of a 100-m-long high-quality graphene transparent conductive film by roll-to-roll chemical vapor deposition and transfer process journal January 2013
Formulas for the Skin Effect journal September 1942
Lab-in-a-Tube: Detection of Individual Mouse Cells for Analysis in Flexible Split-Wall Microtube Resonator Sensors journal October 2011
Nanomechanical Architecture of Strained Bilayer Thin Films: From Design Principles to Experimental Fabrication journal December 2005
Dielectric-lined cylindrical metallic THz waveguides: mode structure and dispersion journal January 2010
Controlled Transfer of Single Rolled-Up InGaAs–GaAs Quantum-Dot Microtube Ring Resonators Using Optical Fiber Abrupt Tapers journal March 2010
Single-mask microfabrication of three-dimensional objects from strained bimorphs journal August 2007
Thinning and Shaping Solid Films into Functional and Integrative Nanomembranes journal April 2012
Advances in Terahertz Waveguides and Sources journal April 2011
Photonic-crystal slab for terahertz-wave integrated circuits conference September 2012
Freestanding SiGe/Si/Cr and SiGe/Si/SixNy/Cr microtubes journal April 2004
Poisson's Ratio of Low-Temperature PECVD Silicon Nitride Thin Films journal June 2007
Terahertz attenuation and dispersion characteristics of coplanar transmission lines journal June 1991
Residual stress improvement of platinum thin film in Au/Pt/Ti/p-GaAs ohmic contact by RF sputtering power journal November 2012
Semiconductor Nanomembrane Tubes: Three-Dimensional Confinement for Controlled Neurite Outgrowth journal March 2011
Self-rolled-up microtube ring resonators: a review of geometrical and resonant properties journal January 2011
A novel low-loss Terahertz waveguide: Polymer tube journal January 2010
Novel Highly Conductive Silver-Tungsten Thin Films Electroless Deposited from Benzoate Solution for Microelectronic Applications journal January 2003
Aligned arrays of single walled carbon nanotubes for transparent electronics conference June 2013
Modelling and fabrication of low operation temperature microcages with a polymer/metal/DLC trilayer structure journal November 2006
Free-standing and overgrown InGaAs/GaAs nanotubes, nanohelices and their arrays journal February 2000
Electroless deposition of novel Ag–W thin films journal November 2003
Optical properties of rolled-up tubular microcavities from shaped nanomembranes journal April 2009
Design of Coil Length of On-Chip Transformer With High Turn Ratio and High Coupling Performance journal November 2012
Ultrasmooth Silver Thin Films Deposited with a Germanium Nucleation Layer journal January 2009
Generation and registration of disturbances in a gas flow. 2. Experiments with arrays of tubular microheaters and microsensors journal May 2009
Strain induced semiconductor nanotubes from formation process to device applications journal September 2008
Influences of process parameters of low frequency PECVD technology on intrinsic stress of silicon nitride thin film
  • Li, Weizhi; Kang, Zhe; Ye, Yun
  • 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, SPIE Proceedings https://doi.org/10.1117/12.867778
conference October 2010
Chemical control of physical properties in silicon nitride films journal October 2012
Dual cylindrical metallic grating-cladding polymer hollow waveguide for terahertz transmission with low loss journal September 2010
Fabrication of conducting GeSi/Si micro- and nanotubes and helical microcoils journal February 2001
Stacked inductors and transformers in CMOS technology journal April 2001
Self-organized 1.55 µm InAs/InP quantum dot tube nanoscale coherent light sources conference January 2011
The detailed analysis of high Q CMOS-compatible microwave spiral inductors in silicon technology journal January 1998
Rolled-up transparent microtubes as two-dimensionally confined culture scaffolds of individual yeast cells journal January 2009
Fabrication and applications of large arrays of multifunctional rolled-up SiO/SiO 2 microtubes journal January 2012
Single rolled-up InGaAs/GaAs quantum dot microtubes integrated with silicon-on-insulator waveguides journal January 2011
Tuning giant magnetoresistance in rolled-up Co–Cu nanomembranes by strain engineering journal January 2012
Mechano-electronic Superlattices in Silicon Nanoribbons journal February 2009
Out-of-plane spiral-coil inductor self-assembled by locally controlled bimorph actuation journal January 2011
Strain-driven self-rolling mechanism for anomalous coiling of multilayer nanohelices journal December 2009
InGaAs/GaAs 3D architecture formation by strain-induced self-rolling with lithographically defined rectangular stripe arrays journal April 2008
Reducing Transmission Losses in Hollow THz Waveguides journal September 2011
Analysis of Bi-Metal Thermostats journal January 1925
Mechanism for Nanotube Formation from Self-Bending Nanofilms Driven by Atomic-Scale Surface-Stress Imbalance journal April 2007
1.3 – 1.55 µm self-organized InAs quantum dot tube nanoscale lasers on silicon conference October 2011
From rolled-up Si microtubes to SiOx/Si optical ring resonators journal May 2007
Transfer printing of flexible hybrid inductor-capacitor filters via pre-etched silicon-on-insulator mother wafer journal August 2012
On-chip spiral inductors suspended over deep copper-lined cavities journal January 2000

Similar Records

Rolled-up transformer structure for a radiofrequency integrated circuit (RFIC)
Patent · Mon Jan 26 23:00:00 EST 2015 · OSTI ID:1168679

Rolled-up inductor structure for a radiofrequency integrated circuit (RFIC)
Patent · Mon Dec 28 23:00:00 EST 2015 · OSTI ID:1234207

Rolled-up transmission line structure for a radiofrequency integrated circuit (RFIC)
Patent · Tue Apr 28 00:00:00 EDT 2015 · OSTI ID:1178676