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Rolled-up transmission line structure for a radiofrequency integrated circuit (RFIC)

Patent ·
OSTI ID:1178676
A rolled-up transmission line structure for a radiofrequency integrated circuit (RFIC) comprises a multilayer sheet in a rolled configuration comprising multiple turns about a longitudinal axis, where the multilayer sheet comprises a conductive pattern layer on a strain-relieved layer. The conductive pattern layer comprises a first conductive film and a second conductive film separated from the first conductive film in a rolling direction. In the rolled configuration, the first conductive film surrounds the longitudinal axis, and the second conductive film surrounds the first conductive film. The first conductive film serves as a signal line and the second conductive film serves as a conductive shield for the rolled-up transmission line structure.
Research Organization:
The Board of Trustees of the University of Illinois, Urbana, IL (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
FG02-07ER46471
Assignee:
The Board of Trustees of the University of Illinois (Urbana, IL)
Patent Number(s):
9,018,050
Application Number:
14/051,192
OSTI ID:
1178676
Country of Publication:
United States
Language:
English

References (70)

Semiconductor Nanomembrane Tubes: Three-Dimensional Confinement for Controlled Neurite Outgrowth journal March 2011
Self-rolled-up microtube ring resonators: a review of geometrical and resonant properties journal January 2011
Versatile Approach for Integrative and Functionalized Tubes by Strain Engineering of Nanomembranes on Polymers journal November 2008
Mechanism of SiN[sub x]H[sub y] Deposition from NH[sub 3]-SiH[sub 4] Plasma journal January 1990
Low-dispersion thin-film microstrip lines with cyclotene (benzocyclobutene) as dielectric medium journal April 1997
Directional scrolling of SiGe/Si/Cr nanoribbon on Si(111) surfaces controlled by two-fold rotational symmetry underetching journal January 2013
A novel low-loss Terahertz waveguide: Polymer tube journal January 2010
Modeling of silicon nitride deposition by RF plasma-enhanced chemical vapor deposition journal January 1994
Physical modeling of spiral inductors on silicon journal March 2000
Miniature 3-D inductors in standard CMOS process journal April 2002
Novel Highly Conductive Silver-Tungsten Thin Films Electroless Deposited from Benzoate Solution for Microelectronic Applications journal January 2003
Geometry Effect on the Strain-Induced Self-Rolling of Semiconductor Membranes journal October 2010
Si IC-compatible inductors and LC passive filters journal January 1990
Controlled Assembly and Dispersion of Strain-Induced InGaAs/GaAs Nanotubes journal July 2008
Aligned arrays of single walled carbon nanotubes for transparent electronics conference June 2013
Coherent emission from ultrathin-walled spiral InGaAs/GaAs quantum dot microtubes journal January 2009
Rolled-up nanotechnology for the fabrication of three-dimensional fishnet-type GaAs-metal metamaterials with negative refractive index at near-infrared frequencies journal April 2012
Modelling and fabrication of low operation temperature microcages with a polymer/metal/DLC trilayer structure journal November 2006
Membrane folding to achieve three-dimensional nanostructures: Nanopatterned silicon nitride folded with stressed chromium hinges journal January 2006
Free-standing and overgrown InGaAs/GaAs nanotubes, nanohelices and their arrays journal February 2000
Electroless deposition of novel Ag–W thin films journal November 2003
Optical properties of rolled-up tubular microcavities from shaped nanomembranes journal April 2009
Ultrasmooth Silver Thin Films Deposited with a Germanium Nucleation Layer journal January 2009
Generation and registration of disturbances in a gas flow. 2. Experiments with arrays of tubular microheaters and microsensors journal May 2009
A 32nm SoC platform technology with 2nd generation high-k/metal gate transistors optimized for ultra low power, high performance, and high density product applications conference December 2009
Strain induced semiconductor nanotubes from formation process to device applications journal September 2008
Morphological Differentiation of Neurons on Microtopographic Substrates Fabricated by Rolled-Up Nanotechnology journal September 2010
Toroidal hollow-core microcavities produced by self-rolling of strained polymer bilayer films journal February 2008
Electroless Silver and Silver with Tungsten Thin Films for Microelectronics and Microelectromechanical System Applications journal January 2000
Generation and registration of disturbances in a gas flow. 1. Formation of arrays of tubular microheaters and microsensors journal March 2009
Stresses and deformation processes in thin films on substrates journal January 1988
Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: I . Orientation Dependence and Behavior of Passivation Layers journal January 1990
Influences of process parameters of low frequency PECVD technology on intrinsic stress of silicon nitride thin film
  • Li, Weizhi; Kang, Zhe; Ye, Yun
  • 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, SPIE Proceedings https://doi.org/10.1117/12.867778
conference October 2010
Chemical control of physical properties in silicon nitride films journal October 2012
Dual cylindrical metallic grating-cladding polymer hollow waveguide for terahertz transmission with low loss journal September 2010
Fabrication of conducting GeSi/Si micro- and nanotubes and helical microcoils journal February 2001
Stacked inductors and transformers in CMOS technology journal April 2001
Determination of coupling capacitance of underpasses, air bridges and crossings in MICs and MMICs journal January 1987
The detailed analysis of high Q CMOS-compatible microwave spiral inductors in silicon technology journal January 1998
Rolled-up transparent microtubes as two-dimensionally confined culture scaffolds of individual yeast cells journal January 2009
Fabrication of silicon nitride waveguides for visible-light using PECVD: a study of the effect of plasma frequency on optical properties journal January 2008
A physical model for planar spiral inductors on silicon conference January 1996
Self-Assembled Ultra-Compact Energy Storage Elements Based on Hybrid Nanomembranes journal July 2010
Fabrication and applications of large arrays of multifunctional rolled-up SiO/SiO 2 microtubes journal January 2012
Lab-in-a-Tube: Detection of Individual Mouse Cells for Analysis in Flexible Split-Wall Microtube Resonator Sensors journal October 2011
Single rolled-up InGaAs/GaAs quantum dot microtubes integrated with silicon-on-insulator waveguides journal January 2011
High-Q Micromachined Inductors for 10-to-30-GHz RFIC Applications on Low Resistivity Si-Substrate conference September 2006
Nanomechanical Architecture of Strained Bilayer Thin Films: From Design Principles to Experimental Fabrication journal December 2005
Dielectric-lined cylindrical metallic THz waveguides: mode structure and dispersion journal January 2010
Formulas for the Skin Effect journal September 1942
Controlled Transfer of Single Rolled-Up InGaAs–GaAs Quantum-Dot Microtube Ring Resonators Using Optical Fiber Abrupt Tapers journal March 2010
Mechano-electronic Superlattices in Silicon Nanoribbons journal February 2009
Single-mask microfabrication of three-dimensional objects from strained bimorphs journal August 2007
Thinning and Shaping Solid Films into Functional and Integrative Nanomembranes journal April 2012
Out-of-plane spiral-coil inductor self-assembled by locally controlled bimorph actuation journal January 2011
Strain-driven self-rolling mechanism for anomalous coiling of multilayer nanohelices journal December 2009
Photonic-crystal slab for terahertz-wave integrated circuits conference September 2012
InGaAs/GaAs 3D architecture formation by strain-induced self-rolling with lithographically defined rectangular stripe arrays journal April 2008
Advances in Terahertz Waveguides and Sources journal April 2011
Reducing Transmission Losses in Hollow THz Waveguides journal September 2011
Analysis of Bi-Metal Thermostats journal January 1925
Freestanding SiGe/Si/Cr and SiGe/Si/SixNy/Cr microtubes journal April 2004
Tuning giant magnetoresistance in rolled-up Co–Cu nanomembranes by strain engineering journal January 2012
Mechanism for Nanotube Formation from Self-Bending Nanofilms Driven by Atomic-Scale Surface-Stress Imbalance journal April 2007
Poisson's Ratio of Low-Temperature PECVD Silicon Nitride Thin Films journal June 2007
Terahertz attenuation and dispersion characteristics of coplanar transmission lines journal June 1991
From rolled-up Si microtubes to SiOx/Si optical ring resonators journal May 2007
Transfer printing of flexible hybrid inductor-capacitor filters via pre-etched silicon-on-insulator mother wafer journal August 2012
Residual stress improvement of platinum thin film in Au/Pt/Ti/p-GaAs ohmic contact by RF sputtering power journal November 2012
On-chip spiral inductors suspended over deep copper-lined cavities journal January 2000

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