skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Doped gate dielectric materials

Patent ·
OSTI ID:1805435

A field effect transistor having at least a gate, source, and drain electrodes and a semiconductor channel for controlling transport of charge carriers between the source and drain electrodes, the gate being insulated from the channel by an dielectric, at least a portion of the dielectric disposed between the gate electrode and the semiconductor channel being doped or imbued with the an element which if doped or imbued into a semiconductor material would cause the semiconductor to be p-type. The p-type element used to dope or imbue the gate dielectric is preferably Mg.

Research Organization:
HRL Labs., LLC, Malibu, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AR000450
Assignee:
HRL Laboratories, LLC (Malibu, CA)
Patent Number(s):
10,903,333
Application Number:
15/663,584
OSTI ID:
1805435
Resource Relation:
Patent File Date: 07/28/2017
Country of Publication:
United States
Language:
English

References (13)

Metal Oxide Semiconductor Thin Film Transistors patent-application January 2012
Method for Manufacturing Nitride Semiconductor Element patent-application November 2013
Semiconductor Device, Inverter Circuit, and Vehicle patent-application September 2016
Back Diffusion Suppression Structures patent-application October 2010
Germanium-Based Quantum Well Devices patent-application March 2016
III-Nitride Metal Insulator Semiconductor Field effect Transistor patent-application January 2013
Semiconductor Device and Method of Manufacturing the Same patent-application September 2016
III-nitride metal insulator semiconductor field effect transistor patent October 2014
Current aperture vertical electron transistors with ammonia molecular beam epitaxy grown p-type Gallium Nitride as a current blocking layer patent-application December 2012
Methods and Apparatus for Measuring Analytes Using Large Scale FET Arrays patent-application June 2016
Method and system for heating semiconductor wafers patent November 2000
Current aperture vertical electron transistors with ammonia molecular beam epitaxy grown p-type Gallium Nitride as a current blocking layer patent-application May 2015
Field Effect Transistor and Method of Manufacturing the Same patent-application January 2011