Lithographic patterning of superconducting YBCO films

Journal Article · Thu Oct 01 00:00:00 EDT 1992 · Journal of Superconductivity

DOI:https://doi.org/10.1007/BF00620502· OSTI ID:171553

Mishra, S K; Pathak, L C; Ray, S K; Kal, S; Bhattacharya, D; Lahiri, S K; Chopra, K L ^[1]

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1. Indian Inst. of Technology, Kharagpur (India)

Microbridges of YBa{sub 2}Cu{sub 3}O{sub 7} thin films have been fabricated by conventional photolithography and wet chemical etching using EDTA, and by lift-off lithography technique. The variation of etch rate with etch time, etchant temperature, and post-deposition sintering temperature has been studied. It has been shown that both techniques are useful for film patterning. However, an additional sintering step is necessary for the chemically etched sample to regain the original film properties. An order of increase in critical current density is observed for the patterned film. 10 refs., 7 figs.

• Sponsoring Organization: USDOE
• OSTI ID: 171553
• Journal Information: Journal of Superconductivity, Journal Name: Journal of Superconductivity Journal Issue: 5 Vol. 5; ISSN 0896-1107; ISSN JOUSEH
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
BARIUM COMPOUNDS
COPPER COMPOUNDS
EDTA
ETCHING
FABRICATION
SINTERING
SPUTTERING
SUPERCONDUCTING FILMS
YTTRIUM COMPOUNDS