Raman microprobe analysis of patterned high Tc superconductor (YBCO) thin films

Journal Article · Thu Jun 01 00:00:00 EDT 1995 · Materials Research Bulletin

DOI:https://doi.org/10.1016/0025-5408(95)00057-7· OSTI ID:82658

Jimenez, J; Martin, E; Martin, P; Torres, A ^[1]; Belouet, C; Chambonnet, D ^[2]

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1. Escuela Tecnica Superior de Ingenieros Industriales, Valladolid (Spain). Fisica de la Materia Condensada
2. Route de Nozay, Le Marcoussis (France). Alcatel Alsthom Recherche

MicroRaman spectroscopy is used for studying patterning induced structural damage in PLD (Pulsed Laser Deposition) YBaCuO High T{sub c} superconductor thin films. The study was focused on the oxygen sublattice vibrations, which give information about different structural aspects of the films. A significant oxygen loss and the presence of residual stresses for laser ablation and ion etching patterning procedures were found. No appreciable consequences at the microRaman resolution scale were detected when patterning was done by wet etching with EDTA (Ethylene Diamine Tetra Acetic Acid).

• OSTI ID: 82658
• Journal Information: Materials Research Bulletin, Journal Name: Materials Research Bulletin Journal Issue: 6 Vol. 30; ISSN MRBUAC; ISSN 0025-5408
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
BARIUM OXIDES
COPPER OXIDES
EDTA
ETCHING
LASER BEAM MACHINING
MAGNESIUM OXIDES
MILLING
RAMAN SPECTROSCOPY
RESIDUAL STRESSES
SAMPLE PREPARATION
STOICHIOMETRY
YTTRIUM OXIDES