Novel method of patterning YBaCuO superconducting thin films

Journal Article · Mon Aug 28 00:00:00 EDT 1989 · Applied Physics Letters; (USA)

DOI:https://doi.org/10.1063/1.102448· OSTI ID:5614261

Ma, Q Y; Yang, E S; Treyz, G V ^[1]; Chang, C ^[2]

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1. Microelectronics Sciences Laboratories and Center for Telecommunication Research, 1312 Mudd, Columbia University, New York, New York 10027 (US)
2. IBM T. J. Watson Research Center, Yorktown Heights, New York 10598

A unique method of patterning YBaCuO thin films based on the inhibition of superconductivity by Si-YBaCuO intermixing has been developed. In the experiment, a thin Si film was first evaporated on a MgO substrate and subsequently patterned using laser direct-write etching. Multilayered YBaCuO thin films were then deposited by {ital e}-beam evaporation and annealed in a rapid thermal annealing system for 30--90 s at 980 {degree}C. The YBaCuO film deposited on the silicon regions became insulating. Auger depth profiling measurements indicate that Si-YBaCuO intermixing had occurred in these areas. Between the insulating regions, narrow YBaCuO superconducting lines were formed. For both 10-{mu}m-wide, 1-mm-long and 2.5-{mu}m-wide, 80-{mu}m-long lines, the {ital T}{sub {ital c}} was observed above 76 K. The critical current density of the lines was measured to be 300 A/cm{sup 2} at 75 K. This patterning technique may be useful for fabrication of high {ital T}{sub {ital c}} superconducting interconnects and devices.

• OSTI ID: 5614261
• Journal Information: Applied Physics Letters; (USA), Journal Name: Applied Physics Letters; (USA) Vol. 55:9; ISSN APPLA; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
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656100 -- Condensed Matter Physics-- Superconductivity
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
ANNEALING
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COATINGS
COPPER COMPOUNDS
COPPER OXIDES
CRITICAL CURRENT
CURRENT DENSITY
CURRENTS
DATA
DEPOSITION
ELECTRIC CONDUCTIVITY
ELECTRIC CURRENTS
ELECTRICAL PROPERTIES
ELEMENTS
ETCHING
EVAPORATION
EXPERIMENTAL DATA
FABRICATION
FILMS
HEAT TREATMENTS
INFORMATION
MAGNESIUM COMPOUNDS
MAGNESIUM OXIDES
MIXING
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
PHASE TRANSFORMATIONS
PHYSICAL PROPERTIES
SEMIMETALS
SILICON
SUPERCONDUCTING DEVICES
SUPERCONDUCTING FILMS
SUPERCONDUCTING WIRES
SUPERCONDUCTIVITY
SURFACE COATING
SURFACE FINISHING
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
VACUUM EVAPORATION
VAPOR DEPOSITED COATINGS
VERY HIGH TEMPERATURE
WIRES
YTTRIUM COMPOUNDS
YTTRIUM OXIDES