Microlithography of high-temperature superconducting films
Conference
·
· IEEE Trans. Magn.; (United States)
OSTI ID:5919760
Narrow lines and microbridge structures have been etched in sputtered superconducting films of Y-Ba-Cu-O by variations of two methods. The first uses standard photolithography followed by wet etching in weak acid. The second uses a maskless process involving a focused pulsed YAG laser together with a computer-controlled x-y stage to produce local ablation of the superconducting film. Issues relating to limits of resolution, annealing of films, and degradation of superconducting properties are critically discussed for the two approaches.
- Research Organization:
- Dept. of Electrical Engineering, Univ. of Rochester, Rochester, NY (US); Lab. for Laser Energetics, Univ. of Rochester, Rochester, NY (US)
- OSTI ID:
- 5919760
- Report Number(s):
- CONF-880812-
- Conference Information:
- Journal Name: IEEE Trans. Magn.; (United States) Journal Volume: 25:2
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
420201* -- Engineering-- Cryogenic Equipment & Devices
656003 -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COMPUTERIZED CONTROL SYSTEMS
CONTROL SYSTEMS
COPPER COMPOUNDS
COPPER OXIDES
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ETCHING
FABRICATION
FILMS
HIGH TEMPERATURE
MICROELECTRONICS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SPUTTERING
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
SURFACE FINISHING
TECHNOLOGY ASSESSMENT
THERMAL DEGRADATION
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
420201* -- Engineering-- Cryogenic Equipment & Devices
656003 -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COMPUTERIZED CONTROL SYSTEMS
CONTROL SYSTEMS
COPPER COMPOUNDS
COPPER OXIDES
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ETCHING
FABRICATION
FILMS
HIGH TEMPERATURE
MICROELECTRONICS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SPUTTERING
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
SURFACE FINISHING
TECHNOLOGY ASSESSMENT
THERMAL DEGRADATION
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES