Two-dimensional self-consistent radio frequency plasma simulations relevant to the Gaseous Electronics Conference RF Reference Cell
- Univ. of Houston, TX (United States)
Over the pst few years multidimensional self-consistent plasma simulations including complex chemistry have been developed which are promising tools for furthering the understanding of reactive gas plasmas and for reactor design and optimization. These simulations must be benchmarked against experimental data obtained in well-characterized systems such as the Gaseous Electronics Conference (GEC) reference cell. Two-dimensional simulations relevant to the GEC Cell are reviewed in this paper with emphasis on fluid simulations. Important features observed experimentally, such as off-axis maxima in the charge density and hot spots of metastable species density near the electrode edges in capacitively-coupled GEC cells, have been captured by these simulations. Glow discharge plasmas are used extensively in the processing of electronic materials especially for etching and deposition of thin films.
- Sponsoring Organization:
- USDOE
- OSTI ID:
- 163205
- Journal Information:
- Journal of Research of the National Institute of Standards and Technology, Journal Name: Journal of Research of the National Institute of Standards and Technology Journal Issue: 4 Vol. 100; ISSN 1044-677X; ISSN JRITEF
- Country of Publication:
- United States
- Language:
- English
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