Fluidized Bed Chemical Vapor Deposition of Zirconium Nitride Films

Arrieta, Marie Y.; Keiser, Jr, Dennis D.; Perez-Nunez, Delia; McDeavitt, Sean M.

doi:10.1080/00295450.2017.1336028

Fluidized Bed Chemical Vapor Deposition of Zirconium Nitride Films

Journal Article · Thu Jul 27 04:00:00 EDT 2017 · Nuclear Technology

DOI:https://doi.org/10.1080/00295450.2017.1336028· OSTI ID:1631702

Arrieta, Marie Y. ^[1]; ^[2]; Perez-Nunez, Delia ^[3]; ^[3]

Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Idaho National Lab. (INL), Idaho Falls, ID (United States)
Texas A & M Univ., College Station, TX (United States)

A fluidized bed-chemical vapor deposition (FB-CVD) process was designed and established in a two-part experiment to produce zirconium nitride barrier coatings on uranium-molybdenum particles for a reduced enrichment dispersion fuel concept. A hot-wall, inverted fluidized bed reaction vessel was developed for this process, and coatings were produced from thermal decomposition of the metallo-organic precursor tetrakis(dimethylamino)zirconium (TDMAZ) in high purity argon gas. Experiments were executed at atmospheric pressure and low substrate temperatures (i.e., 500 to 550 K). Deposited coatings were characterized using scanning electron microscopy, energy dispersive spectroscopy, and wavelength dispersive spectroscopy. Successful depositions were produced on 1 mm diameter tungsten wires and fluidized ZrO₂ -SiO₂ microspheres (185 to 250 µm diameter) with coating thicknesses ranging from 0.5 to 30 µm. The coating deposition rate was nominally estimated to be 0.04 ± 0.02 µm/h. The ZrN coating adhered to the microspheres but there was a significant oxygen and possible carbon contamination.

Research Organization:: Idaho National Laboratory (INL), Idaho Falls, ID (United States)

Sponsoring Organization:: USDOE Office of Energy Efficiency and Renewable Energy (EERE)

Grant/Contract Number:: AC07-05ID14517

OSTI ID:: 1631702

Report Number(s):: INL/JOU--17-42260-Rev000

Journal Information:: Nuclear Technology, Journal Name: Nuclear Technology Journal Issue: 2 Vol. 199; ISSN 0029-5450

Publisher:: Taylor & Francis - formerly American Nuclear Society (ANS)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited By (1)

Fabrication of ZrN Barrier Coatings for U-Mo Microspheres Via Fluidized Bed Chemical Vapor Deposition Using a Metalorganic Precursor Sudderth, L.; Perez-Nunez, D.; Keiser, D. Nuclear Technology, Vol. 202, Issue 1 https://doi.org/10.1080/00295450.2017.1420336	journal	February 2018

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