Characterization of hard nitride and carbide titanium and zirconium coatings on high-speed steel cutting tool inserts

Journal Article · Sat Nov 01 04:00:00 EST 1986 · J. Vac. Sci. Technol., A; (United States)

DOI:https://doi.org/10.1116/1.573652· OSTI ID:7252813

Fenske, G; Kaufherr, N; Albertson, C; Mapalo, G; Nielsen, R; Kaminsky, M

Hard nitride and carbide coatings of titanium and zirconium deposited by reactive evaporation and reactive sputtering techniques were characterized by electron microscopy and Auger spectroscopy to determine the effect of coating process on coating composition and microstructure. Analysis of the chemical composition by Auger spectroscopy revealed the coatings were of high purity with slight differences in stoichiometry depending on the coating technique. Both techniques produced coatings with a columnar microstructure. However, the reactive sputtering technique produced coarser (shorter and wider) columnar grains than the reactive evaporation technique. Furthermore, selected area diffraction analysis of reactively sputtered ZrN coatings showed a two-phased zone (hcp Zr and fcc ZrN) near the substrate/coating interface, while TiC coatings deposited by reactive sputtering and evaporation only showed a single-phase region of fcc TiC.

• Research Organization: Argonne National Laboratory, Argonne, Illinois 60439
• DOE Contract Number: W-31109-ENG-38
• OSTI ID: 7252813
• Journal Information: J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 4:6; ISSN JVTAD
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
ALLOYS
CARBIDES
CARBON COMPOUNDS
CHEMICAL COMPOSITION
COATINGS
CRYSTAL STRUCTURE
CRYSTAL-PHASE TRANSFORMATIONS
CUTTING TOOLS
DEPOSITION
EVAPORATION
INTERFACES
IRON ALLOYS
IRON BASE ALLOYS
MICROSTRUCTURE
NITRIDES
NITROGEN COMPOUNDS
PHASE TRANSFORMATIONS
PNICTIDES
SPUTTERING
STEELS
STOICHIOMETRY
SURFACE COATING
TITANIUM CARBIDES
TITANIUM COMPOUNDS
TITANIUM NITRIDES
TOOLS
TRANSITION ELEMENT COMPOUNDS
VACUUM COATING
VACUUM EVAPORATION
ZIRCONIUM CARBIDES
ZIRCONIUM COMPOUNDS
ZIRCONIUM NITRIDES