Reactively sputtered nitrides and carbides of titanium, zirconium, and hafnium

Journal Article · Sat Nov 01 04:00:00 EST 1986 · J. Vac. Sci. Technol., A; (United States)

DOI:https://doi.org/10.1116/1.573651· OSTI ID:7252789

Sproul, W D

TiN, TiC, ZrN, ZrC, HfN, and HfC coatings were reactively sputtered at high rates of 2300 --5800 A/min onto T-15 high speed steel cutting tool inserts. Nitrogen was controlled through closed loop peak feedback control for the preparation of the nitride coatings, but either peak feedback control or flow control could be used for the carbide coatings. Methane was the reactive gas for TiC and ZrC, but it led to macrovoids in HfC. Acetylene produced dense HfC coatings. All of these coatings are much harder than the values for the bulk materials. Hafnium nitride was the hardest nitride with a Vickers microhardness (50 g) of 4690 kg/mm/sup 2/, whereas ZrC was the hardest carbide with a hardness of 4840 kg/mm/sup 2/. Except for TiC, all of the coatings have a lattice parameter that is greater than the bulk value. The coatings have the NaCl structure with a (111) preferred orientation. All of the coatings have an excellent adhesion to the T-15 substrates, but a ZrN/Zr carbonitride interface was necessary with ZrC to obtain good adhesion. The ZrC and HfC coatings show an adhesion aging effect in which the adhesion increases with time. Vickers microhardness tests (50 g) show that ZrN and HfN have excellent hot hardness up through 800 /sup 0/C, but at 1000 /sup 0/C the hardness of HfN (440 kg/mm/sup 2/) is much less than the hardness of ZrN (760 kg/mm/sup 2/).

• Research Organization: Borg--Warner Research Center, Des Plaines, Illinois 60018
• OSTI ID: 7252789
• Journal Information: J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 4:6; ISSN JVTAD
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360203* -- Ceramics
Cermets
& Refractories-- Mechanical Properties
ADHESION
ALKANES
CARBIDES
CARBON COMPOUNDS
CRYSTAL STRUCTURE
HAFNIUM CARBIDES
HAFNIUM COMPOUNDS
HAFNIUM NITRIDES
HARDNESS
HIGH TEMPERATURE
HYDROCARBONS
MECHANICAL PROPERTIES
METHANE
NITRIDES
NITROGEN COMPOUNDS
ORGANIC COMPOUNDS
PNICTIDES
REFRACTORY METAL COMPOUNDS
SPUTTERING
TEMPERATURE DEPENDENCE
TITANIUM CARBIDES
TITANIUM COMPOUNDS
TITANIUM NITRIDES
TRANSITION ELEMENT COMPOUNDS
VERY HIGH TEMPERATURE
ZIRCONIUM CARBIDES
ZIRCONIUM COMPOUNDS
ZIRCONIUM NITRIDES