Method for reuse of wafers for growth of vertically-aligned wire arrays
Patent
·
OSTI ID:1531745
Reusing a Si wafer for the formation of wire arrays by transferring the wire arrays to a polymer matrix, reusing a patterned oxide for several array growths, and finally polishing and reoxidizing the wafer surface and reapplying the patterned oxide.
- Research Organization:
- California Institute of Technology (CalTech), Pasadena, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- FG02-03ER15483
- Assignee:
- California Institute of Technology (Pasadena, CA)
- Patent Number(s):
- 8,222,123
- Application Number:
- 13/053,090
- OSTI ID:
- 1531745
- Resource Relation:
- Patent File Date: 2011-03-21
- Country of Publication:
- United States
- Language:
- English
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