Method for reuse of wafers for growth of vertically-aligned wire arrays

Spurgeon, Joshua M.; Plass, Katherine E.; Lewis, Nathan S.; Atwater, Harry A.

Method for reuse of wafers for growth of vertically-aligned wire arrays

Patent · 22 March 2011

OSTI ID:1531833

Spurgeon, Joshua M.; Plass, Katherine E.; Lewis, Nathan S.; Atwater, Harry A.

Reusing a Si wafer for the formation of wire arrays by transferring the wire arrays to a polymer matrix, reusing a patterned oxide for several array growths, and finally polishing and reoxidizing the wafer surface and reapplying the patterned oxide.

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Research Organization:: California Inst. of Technology, Pasadena, CA (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: FG02-03ER15483

Assignee:: California Institute of Technology (Pasadena, CA)

Patent Number(s):: 7,910,461

Application Number:: 12/176,100

OSTI ID:: 1531833

Country of Publication:: United States

Language:: English

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