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Title: Method for reuse of wafers for growth of vertically-aligned wire arrays

Abstract

Reusing a Si wafer for the formation of wire arrays by transferring the wire arrays to a polymer matrix, reusing a patterned oxide for several array growths, and finally polishing and reoxidizing the wafer surface and reapplying the patterned oxide.

Inventors:
; ; ;
Publication Date:
Research Org.:
California Institute of Technology (CalTech), Pasadena, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1084359
Patent Number(s):
8,455,333
Application Number:
13/550,395
Assignee:
California Institute of Technology (Pasadena, CA)
DOE Contract Number:  
FG02-03ER15483
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Spurgeon, Joshua M, Plass, Katherine E, Lewis, Nathan S, and Atwater, Harry A. Method for reuse of wafers for growth of vertically-aligned wire arrays. United States: N. p., 2013. Web.
Spurgeon, Joshua M, Plass, Katherine E, Lewis, Nathan S, & Atwater, Harry A. Method for reuse of wafers for growth of vertically-aligned wire arrays. United States.
Spurgeon, Joshua M, Plass, Katherine E, Lewis, Nathan S, and Atwater, Harry A. Tue . "Method for reuse of wafers for growth of vertically-aligned wire arrays". United States. https://www.osti.gov/servlets/purl/1084359.
@article{osti_1084359,
title = {Method for reuse of wafers for growth of vertically-aligned wire arrays},
author = {Spurgeon, Joshua M and Plass, Katherine E and Lewis, Nathan S and Atwater, Harry A},
abstractNote = {Reusing a Si wafer for the formation of wire arrays by transferring the wire arrays to a polymer matrix, reusing a patterned oxide for several array growths, and finally polishing and reoxidizing the wafer surface and reapplying the patterned oxide.},
doi = {},
url = {https://www.osti.gov/biblio/1084359}, journal = {},
number = ,
volume = ,
place = {United States},
year = {2013},
month = {6}
}

Patent:

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