X-ray microdiffraction study of Cu interconnects.
No abstract prepared.
- Research Organization:
- Advanced Photon Source, Argonne National Lab., IL (US); Univ. of Wisconsin at Madison (US)
- Sponsoring Organization:
- US Department of Energy (US)
- DOE Contract Number:
- W-31-109-ENG-38
- OSTI ID:
- 15002806
- Journal Information:
- Applied Physics Letters, Vol. 76, Issue 3; Other Information: PBD: 17 Jan 2000; Related Information: Jan. 17, 2000
- Country of Publication:
- United States
- Language:
- English
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