Measurement of strain in Al-Cu interconnect lines with x-ray microdiffraction.
Journal Article
·
· Journal of Applied Physics
No abstract prepared.
- Research Organization:
- Argonne National Lab. (ANL), Argonne, IL (United States). Advanced Photon Source (APS); Univ. of Wisconsin at Madison (US)
- Sponsoring Organization:
- US Department of Energy (US)
- DOE Contract Number:
- W-31-109-ENG-38
- OSTI ID:
- 15002935
- Journal Information:
- Journal of Applied Physics, Vol. 86, Issue 2; Other Information: PBD: 15 Jul 1999; Related Information: Jul. 15, 1999
- Country of Publication:
- United States
- Language:
- English
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