RGA Analysis of Plasma Cleaned Vacuum Systems [Slides]
- Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
The goal of this project was to qualitatively evaluate the efficacy of using plasma cleaning to remove PDMS from vacuum systems. Silicon containing compounds are notorious for interfering with vacuum system techniques such as x-ray photoelectron spectroscopy (XPS), Auger Electron Spectroscopy (AES) and Secondary lon Mass Spectrometry (SIMS). Finding a way to remotely and rapidly remove contaminants from a system saves time and money for analysts using vacuum analytical techniques.
- Research Organization:
- Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1494343
- Report Number(s):
- SAND--2015-5805; 672296
- Country of Publication:
- United States
- Language:
- English
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