Optical properties of a nanostructured glass-based film using spectroscopic ellipsometry

Journal Article · Tue Dec 22 00:00:00 EST 2015 · Thin Solid Films

DOI:https://doi.org/10.1016/j.tsf.2015.12.046· OSTI ID:1376293

Jellison, G. E. ^[1]; Aytug, T. ^[2]; Lupini, A. R. ^[3]; Paranthaman, M. P. ^[2]; Joshi, Pooran C. ^[3]

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1. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
2. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Chemical Sciences Division
3. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Materials Science & Technology Division

Nanostructured glass films, which are fabricated using spinodally phase-separated low-alkali glasses, have several interesting and useful characteristics, including being robust, non-wetting and antireflective. Spectroscopic ellipsometry measurements have been performed on one such film and its optical properties were analyzed using a 5-layer structural model of the near-surface region. Since the glass and the film are transparent over the spectral region of the measurement, the Sellmeier model is used to parameterize the dispersion in the refractive index. To simulate the variation of the optical properties of the film over the spot size of the ellipsometer (~ 3 × 5 mm), the Sellmeier amplitude is convoluted using a Gaussian distribution. The transition layers between the ambient and the film and between the film and the substrate are modeled as graded layers, where the refractive index varies as a function of depth. These layers are modeled using a two-component Bruggeman effective medium approximation where the two components are the layer above and the layer below. Lastly, the fraction is continuous through the transition layer and is modelled using the incomplete beta function.

• Research Organization: Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
• Sponsoring Organization: USDOE Office of Science (SC), Basic Energy Sciences (BES)
• Grant/Contract Number: AC05-00OR22725
• OSTI ID: 1376293
• Alternate ID(s): OSTI ID: 1331840
• Journal Information: Thin Solid Films, Vol. 617, Issue PA; ISSN 0040-6090
• Publisher: Elsevier
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
Spectroscopic ellipsometry
Nanostructured glass films
Bruggeman effective medium approximation
Incomplete beta function