Method of forming oriented block copolymer line patterns, block copolymer line patterns formed thereby, and their use to form patterned articles
Abstract
A block copolymer film having a line pattern with a high degree of long-range order is formed by a method that includes forming a block copolymer film on a substrate surface with parallel facets, and annealing the block copolymer film to form an annealed block copolymer film having linear microdomains parallel to the substrate surface and orthogonal to the parallel facets of the substrate. The line-patterned block copolymer films are useful for the fabrication of magnetic storage media, polarizing devices, and arrays of nanowires.
- Inventors:
- Publication Date:
- Research Org.:
- Univ. of California, Oakland, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1373919
- Patent Number(s):
- 9,718,094
- Application Number:
- 14/845,488
- Assignee:
- THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
- DOE Contract Number:
- FG02-96ER45612
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2015 Sep 04
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Russell, Thomas P., Hong, Sung Woo, Lee, Dong Hyun, Park, Soojin, and Xu, Ting. Method of forming oriented block copolymer line patterns, block copolymer line patterns formed thereby, and their use to form patterned articles. United States: N. p., 2017.
Web.
Russell, Thomas P., Hong, Sung Woo, Lee, Dong Hyun, Park, Soojin, & Xu, Ting. Method of forming oriented block copolymer line patterns, block copolymer line patterns formed thereby, and their use to form patterned articles. United States.
Russell, Thomas P., Hong, Sung Woo, Lee, Dong Hyun, Park, Soojin, and Xu, Ting. Tue .
"Method of forming oriented block copolymer line patterns, block copolymer line patterns formed thereby, and their use to form patterned articles". United States. https://www.osti.gov/servlets/purl/1373919.
@article{osti_1373919,
title = {Method of forming oriented block copolymer line patterns, block copolymer line patterns formed thereby, and their use to form patterned articles},
author = {Russell, Thomas P. and Hong, Sung Woo and Lee, Dong Hyun and Park, Soojin and Xu, Ting},
abstractNote = {A block copolymer film having a line pattern with a high degree of long-range order is formed by a method that includes forming a block copolymer film on a substrate surface with parallel facets, and annealing the block copolymer film to form an annealed block copolymer film having linear microdomains parallel to the substrate surface and orthogonal to the parallel facets of the substrate. The line-patterned block copolymer films are useful for the fabrication of magnetic storage media, polarizing devices, and arrays of nanowires.},
doi = {},
url = {https://www.osti.gov/biblio/1373919},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2017},
month = {8}
}
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