Method of producing nanopatterned articles, and articles produced thereby

Russell, Thomas P; Park, Soojin; Xu, Ting

Method of producing nanopatterned articles, and articles produced thereby

Patent · 28 April 2015

OSTI ID:1178670

Russell, Thomas P; Park, Soojin; Xu, Ting

A nanopatterned surface is prepared by forming a block copolymer film on a miscut crystalline substrate, annealing the block copolymer film, then reconstructing the surface of the annealed block copolymer film The method creates a well-ordered array of voids in the block copolymer film that is maintained over a large area. The nanopatterned block copolymer films can be used in a variety of different applications, including the fabrication of high density data storage media.

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Research Organization:: University of Massachusetts, Boston, MA (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: FG02-96ER45612

Assignee:: The University of Massachusetts, Boston, MA (United States)

Patent Number(s):: 9,018,649

Application Number:: 14/048,073

OSTI ID:: 1178670

Country of Publication:: United States

Language:: English

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