Method of producing nanopatterned articles, and articles produced thereby

Russell, Thomas P; Park, Soojin; Xu, Ting

Method of producing nanopatterned articles, and articles produced thereby

Patent · Mon Nov 11 23:00:00 EST 2013

OSTI ID:1107912

Russell, Thomas P; Park, Soojin; Xu, Ting

A nanopatterned surface is prepared by forming a block copolymer film on a miscut crystalline substrate, annealing the block copolymer film, then reconstructing the surface of the annealed block copolymer film. The method creates a well-ordered array of voids in the block copolymer film that is maintained over a large area. The nanopatterned block copolymer films can be used ina variety of different applications, including the fabrication of high density data storage media.

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Research Organization:: The University of Massachusetts, Boston, MA (United States); The Regents of the University of California, Oakland, CA (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: FG02-96ER45612

Assignee:: The University of Massachusetts (Boston, MA); The Regents of the University of California (Oakland, CA)

Patent Number(s):: 8,581,272

Application Number:: 13/461,175

OSTI ID:: 1107912

Country of Publication:: United States

Language:: English

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Self-Assembled Masks for the Transfer of Nanometer-Scale Patterns into Surfaces: Characterization by AFM and LFM Meli, Maria-Victoria; Badia, Antonella; Grütter, Peter Nano Letters, Vol. 2, Issue 2, p. 131-135 https://doi.org/10.1021/nl015639v	journal	February 2002
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