Degradation of superconducting Nb/NbN films by atmospheric oxidation

Conference · Wed Mar 01 04:00:00 EST 2017 · IEEE Transactions on Applied Superconductivity

DOI:https://doi.org/10.1109/TASC.2017.2669583· OSTI ID:1356212

Henry, M. David ^[1]; Wolfley, Steve ^[1]; Young, Travis ^[1]; Monson, Todd ^[1]; Pearce, Charles J. ^[1]; Lewis, Rupert ^[1]; Clark, Blythe ^[1]; Brunke, Lyle ^[1]; Missert, Nancy ^[1]

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1. Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Niobium and niobium nitride thin films are transitioning from fundamental research toward wafer scale manufacturing with technology drivers that include superconducting circuits and electronics, optical single photon detectors, logic, and memory. Successful microfabrication requires precise control over the properties of sputtered superconducting films, including oxidation. Previous work has demonstrated the mechanism in oxidation of Nb and how film structure could have deleterious effects upon the superconducting properties. This study provides an examination of atmospheric oxidation of NbN films. By examination of the room temperature sheet resistance of NbN bulk oxidation was identified and confirmed by secondary ion mass spectrometry. As a result, Meissner magnetic measurements confirmed the bulk oxidation not observed with simple cryogenic resistivity measurements.

• Research Organization: Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
• Sponsoring Organization: USDOE National Nuclear Security Administration (NNSA)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 1356212
• Report Number(s): SAND2016-8645C; 647120
• Conference Information: Journal Name: IEEE Transactions on Applied Superconductivity Journal Issue: 4 Journal Volume: 27
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY