Effects of thermal annealing on superconducting Nb and NbN films

Journal Article · Fri Jul 01 04:00:00 EDT 1988 · J. Vac. Sci. Technol., A; (United States)

DOI:https://doi.org/10.1116/1.575559· OSTI ID:7202386

Hatano, M; Nishino, T; Kawabe, U

Thermal annealing in a nitrogen atmosphere degrades the superconducting properties of sputtered Nb and NbN films. Nb film degrades because oxygen atoms diffuse into the grain as interstitial impurities. The effect of this diffusion is suppressed in rapid thermal annealing for 10 s. NbN film degrades due to the release of nitrogen from the NbN lattice and the transformation to the epsilon-NbN phase. Oxygen seems to quicken this degradation and to act as a catalyst in this transformation.

• Research Organization: Central Research Laboratory, Hitachi, Ltd., Kokubunji, Tokyo, Japan
• OSTI ID: 7202386
• Journal Information: J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 6:4; ISSN JVTAD
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360101 -- Metals & Alloys-- Preparation & Fabrication
360104* -- Metals & Alloys-- Physical Properties
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ANNEALING
ATOM TRANSPORT
CATALYSIS
CATALYSTS
COHERENT SCATTERING
CRYSTAL DEFECTS
CRYSTAL STRUCTURE
CRYSTAL-PHASE TRANSFORMATIONS
DIFFRACTION
DIFFUSION
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRON DIFFRACTION
ELEMENTS
FILMS
HEAT TREATMENTS
IMPURITIES
INTERSTITIALS
METALS
NEUTRAL-PARTICLE TRANSPORT
NIOBIUM
NIOBIUM COMPOUNDS
NIOBIUM NITRIDES
NITRIDES
NITROGEN COMPOUNDS
NONMETALS
OXYGEN
PHASE TRANSFORMATIONS
PHYSICAL PROPERTIES
PNICTIDES
POINT DEFECTS
RADIATION TRANSPORT
REFRACTORY METAL COMPOUNDS
SCATTERING
SPUTTERING
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
X-RAY DIFFRACTION