Cr/B4C multilayer mirrors: Study of interfaces and X-ray reflectance

Burcklen, C.; Soufli, R.; Dennetiere, D.; Polack, F.; Capitanio, B.; Gullikson, E.; Meltchakov, E.; Thomasset, M.; Jerome, A.; de Rossi, S.; Delmotte, F.

doi:10.1063/1.4944723

Cr/B₄C multilayer mirrors: Study of interfaces and X-ray reflectance

Journal Article · Thu Mar 24 00:00:00 EDT 2016 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.4944723· OSTI ID:1260484

Burcklen, C. ^[1]; Soufli, R. ^[2]; Dennetiere, D. ^[3]; Polack, F. ^[3]; Capitanio, B. ^[3]; Gullikson, E. ^[4]; Meltchakov, E. ^[1]; Thomasset, M. ^[3]; Jerome, A. ^[1]; de Rossi, S. ^[1]; Delmotte, F. ^[1]

Univ. Paris-Saclay, Palaiseau Cedex (France). Inst. of Optics and Charles Fabry Lab.
Univ. Paris-Saclay, Palaiseau Cedex (France). Inst. of Optics and Charles Fabry Lab.; Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Synchrotron SOLEIL, Gif sur Yvette Cedex (France)
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Center for X-ray Optics

Here, we present an experimental study of the effect of layer interfaces on the x-ray reflectance in Cr/B₄C multilayer interference coatings with layer thicknesses ranging from 0.7 nm to 5.4 nm. The multilayers were deposited by magnetron sputtering and by ion beam sputtering. Grazing incidence x-ray reflectometry, soft x-ray reflectometry, and transmission electron microscopy reveal asymmetric multilayer structures with a larger B₄C-on-Cr interface, which we modeled with a 1–1.5 nm thick interfacial layer. Reflectance measurements in the vicinity of the Cr L_2,3 absorption edge demonstrate fine structure that is not predicted by simulations using the currently tabulated refractive index (optical constants) values for Cr.

View Accepted Manuscript (DOE)

Research Organization:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States); Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)

Sponsoring Organization:: EAG Lab., San Diego, CA (United States); French National Research Agency (ANR); USDOE

Grant/Contract Number:: AC02-05CH11231; AC52-07NA27344

OSTI ID:: 1260484

Alternate ID(s):: OSTI ID: 1243148
OSTI ID: 22594532
OSTI ID: 1440923

Report Number(s):: LLNL--JRNL--680905

Journal Information:: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 12 Vol. 119; ISSN JAPIAU; ISSN 0021-8979

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

References (30)

X-Ray Interactions: Photoabsorption, Scattering, Transmission, and Reflection at E = 50-30,000 eV, Z = 1-92 Henke, B. L.; Gullikson, E. M.; Davis, J. C. Atomic Data and Nuclear Data Tables, Vol. 54, Issue 2, p. 181-342 https://doi.org/10.1006/adnd.1993.1013	journal	July 1993
Development of Al-based multilayer optics for EUV Meltchakov, E.; Hecquet, C.; Roulliay, M. Applied Physics A, Vol. 98, Issue 1 https://doi.org/10.1007/s00339-009-5445-2	journal	October 2009
Fabrication, structure and reflectivity of and multilayers for hard X-ray Yakshin, A. E.; Khodos, I. I.; Zhelezniak, I. M. Optics Communications, Vol. 118, Issue 1-2 https://doi.org/10.1016/0030-4018(95)00209-Q	journal	July 1995
Characterization of Mo/B4C multilayers Jankowski, A. F.; Perry, P. L. Thin Solid Films, Vol. 206, Issue 1-2 https://doi.org/10.1016/0040-6090(91)90452-4	journal	December 1991
X-ray study of state-of-the-art small d-spacing W/B4C multilayers Christensen, F. Journal of X-Ray Science and Technology, Vol. 3, Issue 1 https://doi.org/10.1016/0895-3996(91)90007-S	journal	October 1991
High-resolution, high-flux, user friendly VLS beamline at the ALS for the 50–1300eV energy region Underwood, J. H.; Gullikson, E. M. Journal of Electron Spectroscopy and Related Phenomena, Vol. 92, Issue 1-3 https://doi.org/10.1016/S0368-2048(98)00134-0	journal	May 1998
Design and fabrication of X-ray non-periodic multilayer mirrors: Apodization and shaping of their spectral response Bridou, F.; Delmotte, F.; Troussel, Ph. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 680 https://doi.org/10.1016/j.nima.2012.04.002	journal	July 2012
Stress evolution in B4C and Cr mono-layer and B4C/Cr multilayer films with variable layer thickness for neutron detectors Zhang, Zhong; Liang, Yu; Li, Wenbin Thin Solid Films, Vol. 531 https://doi.org/10.1016/j.tsf.2013.01.084	journal	March 2013
Ion beam sputtered aluminum based multilayer mirrors for extreme ultraviolet solar imaging Ziani, A.; Delmotte, F.; Le Paven-Thivet, C. Thin Solid Films, Vol. 552 https://doi.org/10.1016/j.tsf.2013.12.015	journal	February 2014
IMD—Software for modeling the optical properties of multilayer films Windt, David L. Computers in Physics, Vol. 12, Issue 4 https://doi.org/10.1063/1.168689	journal	January 1998
High performance La/B ₄ C multilayer mirrors with barrier layers for the next generation lithography Chkhalo, N. I.; Künstner, S.; Polkovnikov, V. N. Applied Physics Letters, Vol. 102, Issue 1 https://doi.org/10.1063/1.4774298	journal	January 2013
Ultrathin metal/light material multilayer films: Thermodynamics and microstructure Borchers, C.; Michaelsen, C. Philosophical Magazine A, Vol. 82, Issue 6 https://doi.org/10.1080/01418610208240025	journal	April 2002
Technical Report: Metrology and Test Beamline at SOLEIL Idir, Mourad; Mercere, Pascal; Moreno, Thierry Synchrotron Radiation News, Vol. 19, Issue 4 https://doi.org/10.1080/08940880600864582	journal	August 2006
Comparative study of carbon and boron carbide spacing layers inside soft x-ray mirrors Boher, Pierre; Houdy, Philippe; Kaikati, P. San Diego '90, 8-13 July, SPIE Proceedings https://doi.org/10.1117/12.23312	conference	January 1991
1-40-keV fixed-exit monochromator for a wafer mapping TXRF facility Comin, Fabio; Apostolo, G.; Freund, Andreas K. SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, SPIE Proceedings https://doi.org/10.1117/12.332505	conference	December 1998
Multilayer x-ray optics for energies E > 8 keV and their application in x-ray analysis Dietsch, Reiner; Braun, Stefan; Holz, Thomas International Symposium on Optical Science and Technology, SPIE Proceedings https://doi.org/10.1117/12.405887	conference	November 2000
Recent developments in EUV reflectometry at the Advanced Light Source Gullikson, Eric M.; Mrowka, Stanley; Kaufmann, Benjamin B. 26th Annual International Symposium on Microlithography, SPIE Proceedings https://doi.org/10.1117/12.436712	conference	August 2001
Status of small d-spacing x-ray multilayers development at Osmic Platonov, Yuriy Y.; Gomez, Luis; Broadway, David International Symposium on Optical Science and Technology, SPIE Proceedings https://doi.org/10.1117/12.451345	conference	December 2002
Survey of Ti-, B-, and Y-based soft x-ray–extreme ultraviolet multilayer mirrors for the 2- to 12-nm wavelength region Montcalm, Claude; Kearney, Patrick A.; Slaughter, J. M. Applied Optics, Vol. 35, Issue 25 https://doi.org/10.1364/AO.35.005134	journal	January 1996
Study of normal incidence of three-component multilayer mirrors in the range 20–40 nm Gautier, Julien; Delmotte, Franck; Roulliay, Marc Applied Optics, Vol. 44, Issue 3 https://doi.org/10.1364/AO.44.000384	journal	January 2005
Optical constants of magnetron-sputtered boron carbide thin films from photoabsorption data in the range 30 to 770 eV Soufli, Regina; Aquila, Andrew L.; Salmassi, Farhad Applied Optics, Vol. 47, Issue 25 https://doi.org/10.1364/AO.47.004633	journal	January 2008
Development and calibration of mirrors and gratings for the soft x-ray materials science beamline at the Linac Coherent Light Source free-electron laser Soufli, Regina; Fernández-Perea, Mónica; Baker, Sherry L. Applied Optics, Vol. 51, Issue 12 https://doi.org/10.1364/AO.51.002118	journal	January 2012
Thermal stability studies of short period Sc/Cr and Sc/B ₄ C/Cr multilayers Prasciolu, Mauro; Leontowich, Adam F. G.; Beyerlein, Kenneth R. Applied Optics, Vol. 53, Issue 10 https://doi.org/10.1364/AO.53.002126	journal	January 2014
Spectral properties of La/B - based multilayer mirrors near the boron K absorption edge Makhotkin, Igor A.; Zoethout, Erwin; Louis, Eric Optics Express, Vol. 20, Issue 11 https://doi.org/10.1364/OE.20.011778	journal	January 2012
Normal-incidence x-ray mirror for 7 nm Stearns, D. G.; Vernon, S. P.; Rosen, R. S. Optics Letters, Vol. 16, Issue 16 https://doi.org/10.1364/OL.16.001283	journal	January 1991
Si/B_4C narrow-bandpass mirrors for the extreme ultraviolet Slaughter, J. M.; Watts, R. N.; Falco, Charles M. Optics Letters, Vol. 19, Issue 21 https://doi.org/10.1364/OL.19.001786	journal	January 1994
Multilayer mirror for x rays below 190 eV Michaelsen, C.; Wiesmann, J.; Bormann, R. Optics Letters, Vol. 26, Issue 11 https://doi.org/10.1364/OL.26.000792	journal	January 2001
Normal-incidence reflectance of optimized W/B_4C x-ray multilayers in the range 14 nm < λ < 24 nm Windt, David L.; Gullikson, Eric M.; Walton, Christopher C. Optics Letters, Vol. 27, Issue 24 https://doi.org/10.1364/OL.27.002212	journal	January 2002
High-efficiency B_4C/Mo_2C alternate multilayer grating for monochromators in the photon energy range from 07 to 34 keV Choueikani, Fadi; Lagarde, Bruno; Delmotte, Franck Optics Letters, Vol. 39, Issue 7 https://doi.org/10.1364/OL.39.002141	journal	January 2014
Multilayer optics for XUV spectral region: technology fabrication and applications Andreev, S.; Akhsakhalyan, A.; Bibishkin, M. Open Physics, Vol. 1, Issue 1 https://doi.org/10.2478/BF02475561	journal	January 2003

Cited By (5)

Kossel interferences of proton-induced X-ray emission lines in periodic multilayers Wu, Meiyi; Guen, Karine Le; André, Jean-Michel arXiv https://doi.org/10.48550/arxiv.1612.02140	text	January 2016
Optical performance of W/B ₄ C multilayer mirror in the soft x-ray region Pradhan, P. C.; Majhi, A.; Nayak, M. Journal of Applied Physics, Vol. 123, Issue 9 https://doi.org/10.1063/1.5018266	journal	March 2018
Soft x-ray optical constants of sputtered chromium thin films with improved accuracy in the L and M absorption edge regions Delmotte, Franck; Meyer-Ilse, Julia; Salmassi, Farhad Journal of Applied Physics, Vol. 124, Issue 3 https://doi.org/10.1063/1.5027488	journal	July 2018
Grating metrology for X-ray and V-UV synchrotron beamlines at SOLEIL Thomasset, M.; Dvorak, J.; Brochet, S. Review of Scientific Instruments, Vol. 90, Issue 2 https://doi.org/10.1063/1.5055284	journal	February 2019
Soft X-ray spectral analysis of laser produced molybdenum plasmas using the fundamental and second harmonics of a Nd:YAG laser Lokasani, Ragava; Kawasaki, Hiromu; Shimada, Yuta Optics Express, Vol. 27, Issue 23 https://doi.org/10.1364/oe.27.033351	journal	January 2019

Similar Records

Cr/B{sub 4}C multilayer mirrors: Study of interfaces and X-ray reflectance

Journal Article · Mon Mar 28 00:00:00 EDT 2016 · Journal of Applied Physics · OSTI ID:22594532

Experimental study of Cr/Sc multilayer mirrors for the nitrogen K{sub {alpha}}-emission line

Journal Article · Thu May 15 00:00:00 EDT 2008 · Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films · OSTI ID:21123900

Related Subjects

36 MATERIALS SCIENCE
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
74 ATOMIC AND MOLECULAR PHYSICS
Chemical interdiffusion
Computer modeling
Ion beam assisted deposition
Mirrors
Multilayers
Optical constants
Photons
Soft X-rays
Sputter deposition
Transmission electron microscopy