Experimental study of Cr/Sc multilayer mirrors for the nitrogen K{sub {alpha}}-emission line

Journal Article · Thu May 15 04:00:00 EDT 2008 · Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films

DOI:https://doi.org/10.1116/1.2891248· OSTI ID:21123900

Hardouin, Aurelie; Delmotte, Franck; Ravet, Marie Francoise; Bridou, Francoise; Jerome, Arnaud; Varniere, Francoise; Montcalm, Claude; Hedacq, Sebastien; Gullikson, Eric; Aubert, Pascal ^[1]

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1. Laboratoire Charles Fabry de l'Institut d'Optique, CNRS, Universite Paris-Sud, Campus Polytechnique, RD128, 91127 Palaiseau cedex, France and Xenocs SA, 19 rue Francois Blumet, 38360 Sassenage (France)

The authors present an experimental study of Cr/Sc multilayer mirrors optimized for the detection of the nitrogen K{sub {alpha}}-emission line ({lambda}=3.16 nm) at a grazing incidence around 23 deg., for electron probe microanalysis applications. The multilayers were deposited onto silicon substrates using a dc magnetron sputtering system. They were characterized with grazing incidence copper K{sub {alpha}} x-ray reflectometry and atomic force microscopy, as well as with at-wavelength reflectometry using synchrotron radiation. These various characterization methods pointed out that the interfacial roughness of these multilayers increases drastically with the number of bilayers. Growth parameters were then optimized, and it is shown that the structure and reflectivity of such multilayers can be considerably improved by optimizing the sputter gas pressure during the deposition process. Reflectivity higher than 37% were measured at 22.3 deg. grazing angle for the nitrogen K{sub {alpha}}-emission line.

• OSTI ID: 21123900
• Journal Information: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films, Journal Name: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films Journal Issue: 3 Vol. 26; ISSN 0734-2101; ISSN JVTAD6
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ATOMIC FORCE MICROSCOPY
COPPER
ELECTRON MICROPROBE ANALYSIS
EMISSION
LAYERS
MAGNETRONS
MIRRORS
NITROGEN
REFLECTIVITY
STRONTIUM
SURFACE COATING
SYNCHROTRON RADIATION
X RADIATION