Cr/B{sub 4}C multilayer mirrors: Study of interfaces and X-ray reflectance

Journal Article · Mon Mar 28 04:00:00 EDT 2016 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.4944723· OSTI ID:22594532

Burcklen, C.; Meltchakov, E.; Jérome, A.; Rossi, S. de; Delmotte, F. ^[1]; Soufli, R. ^[1]; Dennetiere, D.; Polack, F.; Capitanio, B.; Thomasset, M. ^[2]; Gullikson, E. ^[3]

---

1. Laboratoire Charles Fabry, Institut d'Optique Graduate School, CNRS, Université Paris-Saclay, 91127 Palaiseau Cedex (France)
2. Synchrotron SOLEIL, L'Orme des Merisiers, Saint Aubin, BP 48F-91192 Gif sur Yvette Cedex (France)
3. Center for X-ray Optics, Lawrence Berkeley National Laboratory, 1 Cyclotron Rd., Berkeley, California 94720 (United States)

We present an experimental study of the effect of layer interfaces on the x-ray reflectance in Cr/B{sub 4}C multilayer interference coatings with layer thicknesses ranging from 0.7 nm to 5.4 nm. The multilayers were deposited by magnetron sputtering and by ion beam sputtering. Grazing incidence x-ray reflectometry, soft x-ray reflectometry, and transmission electron microscopy reveal asymmetric multilayer structures with a larger B{sub 4}C-on-Cr interface, which we modeled with a 1–1.5 nm thick interfacial layer. Reflectance measurements in the vicinity of the Cr L{sub 2,3} absorption edge demonstrate fine structure that is not predicted by simulations using the currently tabulated refractive index (optical constants) values for Cr.

• OSTI ID: 22594532
• Journal Information: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 12 Vol. 119; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ABSORPTION
ASYMMETRY
BORON CARBIDES
CHROMIUM
COATINGS
FINE STRUCTURE
GRAZING
INTERFACES
ION BEAMS
LAYERS
MAGNETRONS
MIRRORS
REFRACTIVE INDEX
SIMULATION
SOFT X RADIATION
SPUTTERING
THICKNESS
TRANSMISSION ELECTRON MICROSCOPY