skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Cr/B4C multilayer mirrors: Study of interfaces and X-ray reflectance

Journal Article · · Journal of Applied Physics
DOI:https://doi.org/10.1063/1.4944723· OSTI ID:1260484
 [1];  [2];  [3];  [3];  [3];  [4];  [1];  [3];  [1];  [1];  [1]
  1. Univ. Paris-Saclay, Palaiseau Cedex (France). Inst. of Optics and Charles Fabry Lab.
  2. Univ. Paris-Saclay, Palaiseau Cedex (France). Inst. of Optics and Charles Fabry Lab.; Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
  3. Synchrotron SOLEIL, Gif sur Yvette Cedex (France)
  4. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Center for X-ray Optics
+ Show Author Affiliations

We present an experimental study of the effect of layer interfaces on the x-ray reflectance in Cr/B 4 C multilayer interference coatings with layer thicknesses ranging from 0.7 nm to 5.4 nm. The multilayers were deposited by magnetron sputtering and by ion beam sputtering. Grazing incidence x-ray reflectometry, soft x-ray reflectometry, and transmission electron microscopy reveal asymmetric multilayer structures with a larger B 4 C-on-Cr interface, which we modeled with a 1-1.5 nm thick interfacial layer. Reflectance measurements in the vicinity of the Cr L 2,3 absorption edge demonstrate fine structure that is not predicted by simulations using the currently tabulated refractive index (optical constants) values for Cr.

Research Organization:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States); Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
Sponsoring Organization:
USDOE; French National Research Agency (ANR); EAG Lab., San Diego, CA (United States)
Grant/Contract Number:
AC52-07NA27344; ANR-11-EQPX-0029; ANR-10-LABX-0039; AC03-76F00098; AC02-05CH11231
OSTI ID:
1260484
Alternate ID(s):
OSTI ID: 1243148; OSTI ID: 1440923
Report Number(s):
LLNL-JRNL-680905; JAPIAU
Journal Information:
Journal of Applied Physics, Vol. 119, Issue 12; ISSN 0021-8979
Publisher:
American Institute of Physics (AIP)Copyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 15 works
Citation information provided by
Web of Science

References (30)

Survey of Ti-, B-, and Y-based soft x-ray–extreme ultraviolet multilayer mirrors for the 2- to 12-nm wavelength region journal January 1996
Thermal stability studies of short period Sc/Cr and Sc/B 4 C/Cr multilayers journal January 2014
Normal-incidence reflectance of optimized W/B_4C x-ray multilayers in the range 14 nm < λ < 24 nm journal January 2002
High-resolution, high-flux, user friendly VLS beamline at the ALS for the 50–1300eV energy region journal May 1998
Development and calibration of mirrors and gratings for the soft x-ray materials science beamline at the Linac Coherent Light Source free-electron laser journal January 2012
X-Ray Interactions: Photoabsorption, Scattering, Transmission, and Reflection at E = 50-30,000 eV, Z = 1-92 journal July 1993
IMD—Software for modeling the optical properties of multilayer films journal January 1998
Development of Al-based multilayer optics for EUV journal October 2009
Ion beam sputtered aluminum based multilayer mirrors for extreme ultraviolet solar imaging journal February 2014
X-ray study of state-of-the-art small d-spacing W/B4C multilayers journal October 1991
1-40-keV fixed-exit monochromator for a wafer mapping TXRF facility
  • Comin, Fabio; Apostolo, G.; Freund, Andreas K.
  • SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, SPIE Proceedings https://doi.org/10.1117/12.332505
conference December 1998
Stress evolution in B4C and Cr mono-layer and B4C/Cr multilayer films with variable layer thickness for neutron detectors journal March 2013
Recent developments in EUV reflectometry at the Advanced Light Source
  • Gullikson, Eric M.; Mrowka, Stanley; Kaufmann, Benjamin B.
  • 26th Annual International Symposium on Microlithography, SPIE Proceedings https://doi.org/10.1117/12.436712
conference August 2001
Optical constants of magnetron-sputtered boron carbide thin films from photoabsorption data in the range 30 to 770 eV journal January 2008
Multilayer optics for XUV spectral region: technology fabrication and applications journal January 2003
Technical Report: Metrology and Test Beamline at SOLEIL journal August 2006
Ultrathin metal/light material multilayer films: Thermodynamics and microstructure journal April 2002
Fabrication, structure and reflectivity of and multilayers for hard X-ray journal July 1995
Design and fabrication of X-ray non-periodic multilayer mirrors: Apodization and shaping of their spectral response
  • Bridou, F.; Delmotte, F.; Troussel, Ph.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 680 https://doi.org/10.1016/j.nima.2012.04.002
journal July 2012
High-efficiency B_4C/Mo_2C alternate multilayer grating for monochromators in the photon energy range from 07 to 34  keV journal January 2014
Comparative study of carbon and boron carbide spacing layers inside soft x-ray mirrors conference January 1991
Characterization of Mo/B4C multilayers journal December 1991
Multilayer mirror for x rays below 190  eV journal January 2001
Si/B_4C narrow-bandpass mirrors for the extreme ultraviolet journal January 1994
Status of small d-spacing x-ray multilayers development at Osmic conference December 2002
Spectral properties of La/B - based multilayer mirrors near the boron K absorption edge journal January 2012
Normal-incidence x-ray mirror for 7 nm journal January 1991
High performance La/B 4 C multilayer mirrors with barrier layers for the next generation lithography journal January 2013
Study of normal incidence of three-component multilayer mirrors in the range 20–40 nm journal January 2005
Multilayer x-ray optics for energies E > 8 keV and their application in x-ray analysis conference November 2000

Cited By (5)

Grating metrology for X-ray and V-UV synchrotron beamlines at SOLEIL journal February 2019
Soft x-ray optical constants of sputtered chromium thin films with improved accuracy in the L and M absorption edge regions journal July 2018
Kossel interferences of proton-induced X-ray emission lines in periodic multilayers text January 2016
Soft X-ray spectral analysis of laser produced molybdenum plasmas using the fundamental and second harmonics of a Nd:YAG laser journal January 2019
Optical performance of W/B 4 C multilayer mirror in the soft x-ray region journal March 2018

Similar Records

Cr/B{sub 4}C multilayer mirrors: Study of interfaces and X-ray reflectance
Journal Article · Mon Mar 28 00:00:00 EDT 2016 · Journal of Applied Physics · OSTI ID:1260484
+8 more
Experimental study of Cr/Sc multilayer mirrors for the nitrogen K{sub {alpha}}-emission line
Journal Article · Thu May 15 00:00:00 EDT 2008 · Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films · OSTI ID:1260484
+7 more
Impact of B4C co-sputtering on structure and optical performance of Cr/Sc multilayer X-ray mirrors
Journal Article · Sun Jan 01 00:00:00 EST 2017 · Optics Express · OSTI ID:1260484
+4 more

Related Subjects

74 ATOMIC AND MOLECULAR PHYSICS
36 MATERIALS SCIENCE
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
Multilayers
Photons
Transmission electron microscopy
Mirrors
Optical constants
Chemical interdiffusion
Ion beam assisted deposition
Sputter deposition
Computer modeling
Soft X-rays